JPS6360472U - - Google Patents
Info
- Publication number
- JPS6360472U JPS6360472U JP15278186U JP15278186U JPS6360472U JP S6360472 U JPS6360472 U JP S6360472U JP 15278186 U JP15278186 U JP 15278186U JP 15278186 U JP15278186 U JP 15278186U JP S6360472 U JPS6360472 U JP S6360472U
- Authority
- JP
- Japan
- Prior art keywords
- baskets
- stages
- offset
- vertical direction
- configuration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Description
第１図はこの考案の一実施例に係るエツチング
治具の使用状態を示す概略断面図、第２図は従来
例のエツチング治具の使用状態を示す概略断面図
である。
２……バスケツト、３……取手、５……半導体
ウエハ、７……エツチング槽、８……エツチング
液、９……連結部材、１０……治具本体。
FIG. 1 is a schematic sectional view showing how an etching jig according to an embodiment of the present invention is used, and FIG. 2 is a schematic sectional view showing how a conventional etching jig is used. 2...Basket, 3...Handle, 5...Semiconductor wafer, 7...Etching tank, 8...Etching liquid, 9...Connecting member, 10...Jig body.
Claims (1)
状態で配列される複数個のバスケツトが、上下方
向に複数段に配列し、かつ隣り合う上下の各段の
バスケツトを互いに隣り合う中間位置に偏倚して
配設した構成であることを特徴とするエツチング
治具。 A plurality of baskets containing semiconductor wafers and arranged in a horizontal or nearly horizontal state are arranged in a plurality of stages in the vertical direction, and the baskets in the adjacent upper and lower stages are offset to an intermediate position between each other. An etching jig characterized by having a configuration in which:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15278186U JPH0421821Y2 (en) | 1986-10-02 | 1986-10-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15278186U JPH0421821Y2 (en) | 1986-10-02 | 1986-10-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6360472U true JPS6360472U (en) | 1988-04-22 |
| JPH0421821Y2 JPH0421821Y2 (en) | 1992-05-19 |
Family
ID=31071070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15278186U Expired JPH0421821Y2 (en) | 1986-10-02 | 1986-10-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0421821Y2 (en) |
-
1986
- 1986-10-02 JP JP15278186U patent/JPH0421821Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0421821Y2 (en) | 1992-05-19 |