JPH01104021U - - Google Patents
Info
- Publication number
- JPH01104021U JPH01104021U JP19720887U JP19720887U JPH01104021U JP H01104021 U JPH01104021 U JP H01104021U JP 19720887 U JP19720887 U JP 19720887U JP 19720887 U JP19720887 U JP 19720887U JP H01104021 U JPH01104021 U JP H01104021U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- wafer support
- quartz boat
- longitudinal direction
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図ないし第３図は本考案の石英ボートの一
実施例を示す図であり、第１図は正面図、第２図
は平面図、第３図は第１図のＡ―Ａ線における断
面図、そして、第４図ないし第６図は従来の石英
ボートの一例を示す図であり、第４図は正面図、
第５図は平面図、第６図は第４図のＡ―Ａ線にお
ける断面図である。
１……従来の石英ボート、２……ウエーハ支持
部材、２ａ……溝部、３……連結部材、６……本
考案の一実施例の石英ボート、７……石英ボート
本体、７ａ……ウエーハ支持部材、７ｂ……連結
部材、７ｄ……溝部、８……支持脚。
1 to 3 are diagrams showing an embodiment of the quartz boat of the present invention, in which FIG. 1 is a front view, FIG. 2 is a plan view, and FIG. 3 is taken along line AA in FIG. 1. The sectional view and FIGS. 4 to 6 are views showing an example of a conventional quartz boat, and FIG. 4 is a front view,
FIG. 5 is a plan view, and FIG. 6 is a sectional view taken along line AA in FIG. 4. DESCRIPTION OF SYMBOLS 1... Conventional quartz boat, 2... Wafer support member, 2a... Groove, 3... Connecting member, 6... Quartz boat of an embodiment of the present invention, 7... Quartz boat body, 7a... Wafer Support member, 7b... Connection member, 7d... Groove, 8... Support leg.
Claims (1)
両端部が石英製連結部材で結合され、さらにその
上部に半導体基板用ウエーハを立設させる溝部が
、上記ウエーハ支持部材の長手方向に多数形成さ
れた石英ボート本体と、この石英ボート本体の下
部に、上記ウエーハ支持部材の長手方向に間隔を
空けて設けられた複数個の石英製支持脚とからな
る不純物拡散用石英ボート。 Both ends of two mutually parallel quartz wafer support members are connected by a quartz connection member, and a large number of grooves are formed in the longitudinal direction of the wafer support member above which wafers for semiconductor substrates are placed upright. A quartz boat for impurity diffusion comprising a quartz boat body and a plurality of quartz support legs provided at the lower part of the quartz boat body at intervals in the longitudinal direction of the wafer support member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19720887U JPH01104021U (en) | 1987-12-25 | 1987-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19720887U JPH01104021U (en) | 1987-12-25 | 1987-12-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104021U true JPH01104021U (en) | 1989-07-13 |
Family
ID=31487774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19720887U Pending JPH01104021U (en) | 1987-12-25 | 1987-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104021U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290927A (en) * | 1985-10-17 | 1987-04-25 | Toshiba Ceramics Co Ltd | Semiconductor wafer processing jig |
-
1987
- 1987-12-25 JP JP19720887U patent/JPH01104021U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6290927A (en) * | 1985-10-17 | 1987-04-25 | Toshiba Ceramics Co Ltd | Semiconductor wafer processing jig |