JPS635641U - - Google Patents
Info
- Publication number
- JPS635641U JPS635641U JP9667186U JP9667186U JPS635641U JP S635641 U JPS635641 U JP S635641U JP 9667186 U JP9667186 U JP 9667186U JP 9667186 U JP9667186 U JP 9667186U JP S635641 U JPS635641 U JP S635641U
- Authority
- JP
- Japan
- Prior art keywords
- rod member
- wafer support
- support
- support rod
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図乃至第３図は本考案の実施例に係るウエ
ハ支持ボートを示し、第１図は斜視図、第２図は
その要部上面図、第３図は正面図である。第４図
及び第５図は従来技術に係るウエハ支持ボートを
示し、第４図は正面図、第５図は上面図である。
１：ウエハ支持ボート、２Ａ，２Ｂ：半導体ウ
エハ、１１：一の支持棒材、１２〜１５：一又は
複数本のウエハ支持棒材、２１〜２４：ウエハ支
持溝。
1 to 3 show a wafer support boat according to an embodiment of the present invention, in which FIG. 1 is a perspective view, FIG. 2 is a top view of the main parts thereof, and FIG. 3 is a front view. 4 and 5 show a wafer support boat according to the prior art, with FIG. 4 being a front view and FIG. 5 being a top view. 1: wafer support boat, 2A, 2B: semiconductor wafer, 11: one support rod, 12-15: one or more wafer support rods, 21-24: wafer support groove.
Claims (1)
複数本のウエハ支持棒材を平行に延設するととも
に、前記中央支持部材の左右両周面側に交互にウ
エハ支持溝を形成し、半導体ウエハが前記一の支
持棒部材の両側に、左右交互に列設可能に構成し
た事を特徴とするウエハ支持ボート。 (2) 前記左右交互に列設した半導体ウエハが、
互いに平行関係を維持して配置可能に構成した実
用新案登録請求の範囲第１項記載のウエハ支持ボ
ート。 (3) 前記一の支持棒部材の配設位置を中央位置
より左右いずれかの方向にずらす事により、該一
の支持棒部材の左右両側に異なる直径の半導体ウ
エハが配設可能に構成した実用新案登録請求の範
囲第１項又は第２項記載のウエハ支持ボート。[Claims for Utility Model Registration] (1) One or more wafer support rods are installed in parallel on both sides of one support rod member, and on both left and right peripheral surfaces of the center support member. A wafer support boat characterized in that wafer support grooves are alternately formed so that semiconductor wafers can be arranged in rows alternately on both sides of the one support rod member. (2) The semiconductor wafers arranged in alternating left and right rows,
A wafer support boat according to claim 1, which is configured to be able to be arranged in a parallel relationship with each other. (3) A practical structure in which semiconductor wafers of different diameters can be placed on both the left and right sides of the one support rod member by shifting the placement position of the one support rod member from the center position to either the left or right direction. A wafer support boat according to claim 1 or 2 of the patent registration claim.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9667186U JPS635641U (en) | 1986-06-26 | 1986-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9667186U JPS635641U (en) | 1986-06-26 | 1986-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635641U true JPS635641U (en) | 1988-01-14 |
Family
ID=30962662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9667186U Pending JPS635641U (en) | 1986-06-26 | 1986-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635641U (en) |
-
1986
- 1986-06-26 JP JP9667186U patent/JPS635641U/ja active Pending
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