JPS6314570U - - Google Patents
Info
- Publication number
- JPS6314570U JPS6314570U JP10634486U JP10634486U JPS6314570U JP S6314570 U JPS6314570 U JP S6314570U JP 10634486 U JP10634486 U JP 10634486U JP 10634486 U JP10634486 U JP 10634486U JP S6314570 U JPS6314570 U JP S6314570U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support stand
- semiconductor wafer
- cathode electrode
- contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Description
第１図は本考案の一実施例を示し、ａは要部断
面図、ｂはウエハ部平面図、第２図は従来のめつ
き装置を示し、ａは要部平面図、ｂはウエハ部平
面図である。
１：ウエハ、２：カソード電極、３：アノード
ネツト、４：めつき液、５：めつき槽底部、６：
蓋体、７：めつき液流出口。
FIG. 1 shows an embodiment of the present invention, in which a is a sectional view of the main part, b is a plan view of the wafer part, and FIG. 2 is a conventional plating apparatus, in which a is a plan view of the main part, and b is a plan view of the wafer part. FIG. 1: Wafer, 2: Cathode electrode, 3: Anode net, 4: Plating solution, 5: Bottom of plating tank, 6:
Lid body, 7: Plating liquid outlet.
Claims (1)
エハ支持台と該支持台の上方に配置される蓋体と
を有し、該蓋体に支持台に向かうめつき液流出口
と該流出口の下側に張られたアノードネツトとを
備えたことを特徴とする半導体ウエハのめつき装
置。 It has a wafer support stand equipped with a cathode electrode that contacts the side surface of the wafer, and a lid disposed above the support stand. 1. A semiconductor wafer plating apparatus characterized by comprising: an anode net stretched over a semiconductor wafer;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634486U JPS6314570U (en) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10634486U JPS6314570U (en) | 1986-07-11 | 1986-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314570U true JPS6314570U (en) | 1988-01-30 |
Family
ID=30981612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10634486U Pending JPS6314570U (en) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314570U (en) |
-
1986
- 1986-07-11 JP JP10634486U patent/JPS6314570U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6314570U (en) | ||
| JPH0336U (en) | ||
| JPS6394967U (en) | ||
| JPH0165860U (en) | ||
| JPS62147338U (en) | ||
| JPS6274338U (en) | ||
| JPS6373939U (en) | ||
| JPS6236529U (en) | ||
| JPS61195049U (en) | ||
| JPS6430844U (en) | ||
| JPS6273543U (en) | ||
| JPH02149765U (en) | ||
| JPS6389974U (en) | ||
| JPS63143577U (en) | ||
| JPS6364055U (en) | ||
| JPH01147265U (en) | ||
| JPS61199573U (en) | ||
| JPS5929746U (en) | Processing tank of single-tank embedding device | |
| JPH0299970U (en) | ||
| JPS63143576U (en) | ||
| JPS63162539U (en) | ||
| JPH031970U (en) | ||
| JPH03100028U (en) | ||
| JPS62122866U (en) | ||
| JPS63142536U (en) |