JPS63164215U - - Google Patents
Info
- Publication number
- JPS63164215U JPS63164215U JP5761287U JP5761287U JPS63164215U JP S63164215 U JPS63164215 U JP S63164215U JP 5761287 U JP5761287 U JP 5761287U JP 5761287 U JP5761287 U JP 5761287U JP S63164215 U JPS63164215 U JP S63164215U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- chuck
- wafer
- container
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Description
第１図〜第３図はこの考案による回転塗布装置
の一実施例を示す図で、第１図は要部縦断面図、
第２図は第１図の放熱体部分の斜視図、第３図は
第１図の放熱体部分の縦断面図、第４図及び第５
図は従来の回転塗布装置を示す図で、第４図は縦
断面図、第５図は第４図の要部拡大断面図である
。
図中、１は容器、２はノズル、３はホトレジス
ト、７は回転軸、７ａは穴、９は封止体、１２は
チヤツク、１２ａは穴、１３はウエハ、２１は放
熱体である。なお、図中同一符号は同一又は相当
部分を示す。
Figures 1 to 3 are diagrams showing an embodiment of the spin coating device according to this invention, and Figure 1 is a vertical cross-sectional view of the main part;
Figure 2 is a perspective view of the heat sink part in Figure 1, Figure 3 is a longitudinal sectional view of the heat sink part in Figure 1, Figures 4 and 5.
The figures show a conventional spin coating device, with FIG. 4 being a longitudinal sectional view and FIG. 5 being an enlarged sectional view of the main part of FIG. 4. In the figure, 1 is a container, 2 is a nozzle, 3 is a photoresist, 7 is a rotating shaft, 7a is a hole, 9 is a sealing body, 12 is a chuck, 12a is a hole, 13 is a wafer, and 21 is a heat sink. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
転軸に接触して気密を保つ封止体を介して供給さ
れる吸気により上記チヤツクに保持されるウエハ
とを容器内に収納し、上記容器に上記ウエハ上に
ホトレジストを滴下するノズルを設けるものにお
いて、上記回転軸または上記チヤツクに放熱体を
固定したことを特徴とする回転塗布装置。 A chuck fitted into the upper end of the rotating shaft and a wafer held in the chuck by air supplied through a sealing member that contacts the rotating shaft to maintain airtightness are housed in a container, and the wafer is placed in the container. 1. A rotary coating apparatus provided with a nozzle for dropping photoresist onto the wafer, characterized in that a heat radiator is fixed to the rotating shaft or the chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761287U JPS63164215U (en) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761287U JPS63164215U (en) | 1987-04-16 | 1987-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164215U true JPS63164215U (en) | 1988-10-26 |
Family
ID=30887481
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5761287U Pending JPS63164215U (en) | 1987-04-16 | 1987-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164215U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53773A (en) * | 1976-06-10 | 1978-01-06 | Fruehwirth Rudolf | Cigarette dispenser |
-
1987
- 1987-04-16 JP JP5761287U patent/JPS63164215U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53773A (en) * | 1976-06-10 | 1978-01-06 | Fruehwirth Rudolf | Cigarette dispenser |