JPS63164217U - - Google Patents
Info
- Publication number
- JPS63164217U JPS63164217U JP5761487U JP5761487U JPS63164217U JP S63164217 U JPS63164217 U JP S63164217U JP 5761487 U JP5761487 U JP 5761487U JP 5761487 U JP5761487 U JP 5761487U JP S63164217 U JPS63164217 U JP S63164217U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- container
- motor
- chuck
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第1図はこの考案による回転塗布装置の一実施
例を示す縦断面図、第2図はこの考案の他の実施
例を示す要部縦断面図、第3図及び第4図は従来
の回転塗布装置を示す図で、第3図は縦断面図、
第4図は第3図の要部拡大断面図である。
図中、1は容器、2はノズル、3はホトレジス
ト、7は回転軸、7Aは回転軸延在部、7aは穴
、9は封止体、12はチヤツク、12aは穴、1
3はウエハ、18は封止体(磁性流体シール)で
ある。なお、図中同一符号は同一又は相当部分を
示す。
Fig. 1 is a longitudinal cross-sectional view showing one embodiment of a rotary coating device according to this invention, Fig. 2 is a longitudinal cross-sectional view of main parts showing another embodiment of this invention, and Figs. This is a diagram showing the coating device, and FIG. 3 is a longitudinal sectional view;
FIG. 4 is an enlarged sectional view of the main part of FIG. 3. In the figure, 1 is a container, 2 is a nozzle, 3 is a photoresist, 7 is a rotating shaft, 7A is a rotating shaft extension part, 7a is a hole, 9 is a sealing body, 12 is a chuck, 12a is a hole, 1
3 is a wafer, and 18 is a sealing body (magnetic fluid seal). Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
、上記回転軸に接触して気密を保つ封止体を介し
て供給される吸気により上記チヤツクに保持され
るウエハとを容器内に収納し、上記容器に上記ウ
エハ上にホトレジストを滴下するノズルを設けた
ものにおいて、上記回転軸を上記モータの下方に
も延在させ、上記封止体を上記回転軸の延在部に
設けたことを特徴とする回転塗布装置。 A chuck fitted into the upper end of the rotating shaft of the motor, and a wafer held in the chuck by air supplied through a sealing member that contacts the rotating shaft to maintain airtightness are housed in a container. The container is provided with a nozzle for dropping photoresist onto the wafer, characterized in that the rotating shaft extends below the motor, and the sealing body is provided at the extending portion of the rotating shaft. Rotary coating equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5761487U JPS63164217U (en) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5761487U JPS63164217U (en) | 1987-04-16 | 1987-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63164217U true JPS63164217U (en) | 1988-10-26 |
Family
ID=30887485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5761487U Pending JPS63164217U (en) | 1987-04-16 | 1987-04-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63164217U (en) |
-
1987
- 1987-04-16 JP JP5761487U patent/JPS63164217U/ja active Pending
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