JPH02135137U - - Google Patents
Info
- Publication number
- JPH02135137U JPH02135137U JP4245389U JP4245389U JPH02135137U JP H02135137 U JPH02135137 U JP H02135137U JP 4245389 U JP4245389 U JP 4245389U JP 4245389 U JP4245389 U JP 4245389U JP H02135137 U JPH02135137 U JP H02135137U
- Authority
- JP
- Japan
- Prior art keywords
- contact surface
- workpiece
- porous body
- porous
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003566 sealing material Substances 0.000 claims description 2
Landscapes
- Jigs For Machine Tools (AREA)
- Gripping On Spindles (AREA)
Description
第１図は本考案の第１の実施例を示す中央断面
図、第２図は第２の実施例を示す中央断面図、第
３図は第３の実施例を示す中央断面図、第４図は
第４の実施例を示す中央断面図である。
１……真空容器、３……排気パイプ、４……多
孔質体、７……接触面、８……シール材、２０…
…ワーク。
Fig. 1 is a central sectional view showing the first embodiment of the present invention, Fig. 2 is a central sectional view showing the second embodiment, Fig. 3 is a central sectional view showing the third embodiment, and Fig. 4 is a central sectional view showing the third embodiment. The figure is a central sectional view showing the fourth embodiment. DESCRIPTION OF SYMBOLS 1... Vacuum container, 3... Exhaust pipe, 4... Porous body, 7... Contact surface, 8... Sealing material, 20...
…work.
Claims (1)
ーク２０との接触面７を持つ多孔質体４を取り付
けるとともに、この多孔質体４の上記接触面以外
の露出部を非通気性のシール材８によりシールし
たことを特徴とするワーク保持用チヤツク。 A porous body 4 having a contact surface 7 with a workpiece 20 is attached to the opening of a vacuum container 1 equipped with an exhaust pipe 3, and an exposed part of the porous body 4 other than the contact surface is covered with a non-porous sealing material. A chuck for holding a workpiece, characterized by being sealed by 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245389U JPH02135137U (en) | 1989-04-11 | 1989-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4245389U JPH02135137U (en) | 1989-04-11 | 1989-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02135137U true JPH02135137U (en) | 1990-11-09 |
Family
ID=31554013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4245389U Pending JPH02135137U (en) | 1989-04-11 | 1989-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02135137U (en) |
-
1989
- 1989-04-11 JP JP4245389U patent/JPH02135137U/ja active Pending