JPS61164041U - - Google Patents
Info
- Publication number
- JPS61164041U JPS61164041U JP4056585U JP4056585U JPS61164041U JP S61164041 U JPS61164041 U JP S61164041U JP 4056585 U JP4056585 U JP 4056585U JP 4056585 U JP4056585 U JP 4056585U JP S61164041 U JPS61164041 U JP S61164041U
- Authority
- JP
- Japan
- Prior art keywords
- adhering
- dust
- utility
- scope
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000002265 prevention Effects 0.000 claims 1
Description
図は本考案の一実施例の斜視図である。
符号の説明、１：キヤリア本体、２：溝、３：
塵埃付着防止用カバー。
The figure is a perspective view of an embodiment of the present invention. Explanation of symbols, 1: Carrier body, 2: Groove, 3:
Cover to prevent dust from adhering.
Claims (1)
ための塵埃付着防止用カバーを設けたことを特徴
とするウエハ収納治具。 A wafer storage jig characterized by being provided with a dust adhesion prevention cover for preventing dust from adhering to the stored wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056585U JPS61164041U (en) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4056585U JPS61164041U (en) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164041U true JPS61164041U (en) | 1986-10-11 |
Family
ID=30549571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4056585U Pending JPS61164041U (en) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164041U (en) |
-
1985
- 1985-03-20 JP JP4056585U patent/JPS61164041U/ja active Pending
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