JPS63164216U - - Google Patents
Info
- Publication number
- JPS63164216U JPS63164216U JP5761387U JP5761387U JPS63164216U JP S63164216 U JPS63164216 U JP S63164216U JP 5761387 U JP5761387 U JP 5761387U JP 5761387 U JP5761387 U JP 5761387U JP S63164216 U JPS63164216 U JP S63164216U
- Authority
- JP
- Japan
- Prior art keywords
- container
- housing
- rotating shaft
- chuck
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000012809 cooling fluid Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案による回転塗布装置の一実施
例を示す要部縦断面図、第２図は従来の回転塗布
装置を示す縦断面図である。
図中、１は容器、２はノズル、３はホトレジス
ト、６はモータ、７は回転軸、８はチヤツク、９
はウエハ、１１はハウジング、１３は管路である
。なお、図中同一符号は同一部分を示す。
FIG. 1 is a longitudinal cross-sectional view of a main part of an embodiment of the spin coating device according to this invention, and FIG. 2 is a longitudinal cross-sectional view of a conventional spin coating device. In the figure, 1 is a container, 2 is a nozzle, 3 is a photoresist, 6 is a motor, 7 is a rotating shaft, 8 is a chuck, and 9
11 is a wafer, 11 is a housing, and 13 is a conduit. Note that the same reference numerals in the figures indicate the same parts.
Claims (1)
このチヤツクに保持されるウエハとを容器内に収
納し、上記容器に上記ウエハ上にホトレジストを
滴下するノズルを設けたものにおいて、上記回転
軸を包囲するハウジングと、このハウジング内に
冷却流体を通す管路とを設けたことを特徴とする
回転塗布装置。 A chuck fitted into the upper end of the rotating shaft of an electric motor and a wafer held by the chuck are housed in a container, and the container is provided with a nozzle for dropping photoresist onto the wafer, and the rotating shaft is surrounded. 1. A rotary coating device comprising: a housing for cooling; and a conduit for passing a cooling fluid through the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761387U JPS63164216U (en) | 1987-04-16 | 1987-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5761387U JPS63164216U (en) | 1987-04-16 | 1987-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63164216U true JPS63164216U (en) | 1988-10-26 |
Family
ID=30887483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5761387U Pending JPS63164216U (en) | 1987-04-16 | 1987-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63164216U (en) |
-
1987
- 1987-04-16 JP JP5761387U patent/JPS63164216U/ja active Pending