JPS6151733U - - Google Patents
Info
- Publication number
- JPS6151733U JPS6151733U JP13748684U JP13748684U JPS6151733U JP S6151733 U JPS6151733 U JP S6151733U JP 13748684 U JP13748684 U JP 13748684U JP 13748684 U JP13748684 U JP 13748684U JP S6151733 U JPS6151733 U JP S6151733U
- Authority
- JP
- Japan
- Prior art keywords
- outlet
- rotary table
- drive motor
- inner container
- outer container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000002699 waste material Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
Description
第１図は本考案に係る製造装置の断面図、第２
図はその平面図、第３図は製造装置の洗浄時の断
面図、第４図は洗浄時の平面図、第５図は従来の
製造装置の断面図である。
１……ウエーハ、１０……回転テーブル、１１
……載置台、１２……支柱、１３……第１の駆動
モータ、１４……外容器、１５……第１の排出口
、１６……第２の排出口、１７……回転筒、１８
……内容器、１９……第３の排出口、２０……第
２の駆動モータ。
Figure 1 is a sectional view of the manufacturing equipment according to the present invention, Figure 2
3 is a sectional view of the manufacturing apparatus during cleaning, FIG. 4 is a plan view of the manufacturing apparatus during cleaning, and FIG. 5 is a sectional view of the conventional manufacturing apparatus. 1...Wafer, 10...Rotary table, 11
...Placement table, 12... Strut, 13... First drive motor, 14... Outer container, 15... First discharge port, 16... Second discharge port, 17... Rotating tube, 18
... Inner container, 19 ... Third discharge port, 20 ... Second drive motor.
Claims (1)
ブルを回転させる回転制御可能な第１の駆動モー
タと、底部の２個所に廃液を排出する第１及び第
２の排出口を有し、回転テーブルの周囲を囲繞す
る外容器と、回転テーブルと外容器との間に回動
自在に設けられ、回転テーブルを囲繞すると共に
底部の前記外容器の第１の排出口或いは第２の排
出口と一致する個所に廃液を排出する第３の排出
口を形成した内容器と、内容器を回動させる第２
の駆動モータとで構成したことを特徴とする判導
体装着の製造装置。 It has a rotary table that holds a wafer, a first drive motor that rotates the rotary table and can control its rotation, and a first and second outlet for discharging waste liquid at two places at the bottom. A surrounding outer container is rotatably provided between the rotary table and the outer container, surrounds the rotary table, and is provided at a location on the bottom that coincides with the first outlet or the second outlet of the outer container. An inner container forming a third outlet for discharging waste liquid, and a second inner container for rotating the inner container.
1. A manufacturing device for mounting a size conductor, characterized by comprising a drive motor and a drive motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (en) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (en) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151733U true JPS6151733U (en) | 1986-04-07 |
| JPS6350847Y2 JPS6350847Y2 (en) | 1988-12-27 |
Family
ID=30695901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13748684U Expired JPS6350847Y2 (en) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350847Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01228129A (en) * | 1988-03-09 | 1989-09-12 | Tokyo Electron Ltd | Development device |
| JP2002329705A (en) * | 2001-04-26 | 2002-11-15 | Shibaura Mechatronics Corp | Spin treatment unit |
-
1984
- 1984-09-10 JP JP13748684U patent/JPS6350847Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01228129A (en) * | 1988-03-09 | 1989-09-12 | Tokyo Electron Ltd | Development device |
| JP2002329705A (en) * | 2001-04-26 | 2002-11-15 | Shibaura Mechatronics Corp | Spin treatment unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350847Y2 (en) | 1988-12-27 |
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