JPS6329931U - - Google Patents
Info
- Publication number
- JPS6329931U JPS6329931U JP12252586U JP12252586U JPS6329931U JP S6329931 U JPS6329931 U JP S6329931U JP 12252586 U JP12252586 U JP 12252586U JP 12252586 U JP12252586 U JP 12252586U JP S6329931 U JPS6329931 U JP S6329931U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- holding part
- processing surface
- wafer
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Description
第１図は本考案に係る一実施例の半導体製造装
置の正断面図、第２図は第１図の平面図である。
第３図は従来の半導体製造装置の正断面図、第４
図は第３図の一部拡大正面図である。
１０……保持部、１１……ウエーハ、１０ａ…
…液だめ部、１３……アーム、１７……半導体製
造装置。
FIG. 1 is a front sectional view of a semiconductor manufacturing apparatus according to an embodiment of the present invention, and FIG. 2 is a plan view of FIG. 1.
Figure 3 is a front cross-sectional view of conventional semiconductor manufacturing equipment;
The figure is a partially enlarged front view of FIG. 3. 10...Holding section, 11...Wafer, 10a...
...liquid reservoir, 13...arm, 17...semiconductor manufacturing equipment.
Claims (1)
し、且つ、ウエーハの処理面上に所定の量の処理
液を貯溜する液だめ部を形成した保持部と、この
保持部をアームを介して一体的に支持した回転軸
とを具備したことを特徴とする半導体製造装置。 A holding part that vacuum-chucks the outer peripheral edge of the processing surface of a semiconductor wafer and forms a liquid reservoir for storing a predetermined amount of processing liquid on the processing surface of the wafer, and this holding part is integrated via an arm. What is claimed is: 1. A semiconductor manufacturing device comprising: a rotating shaft that is supported by a rotating shaft;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252586U JPS6329931U (en) | 1986-08-08 | 1986-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12252586U JPS6329931U (en) | 1986-08-08 | 1986-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329931U true JPS6329931U (en) | 1988-02-27 |
Family
ID=31012792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12252586U Pending JPS6329931U (en) | 1986-08-08 | 1986-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329931U (en) |
-
1986
- 1986-08-08 JP JP12252586U patent/JPS6329931U/ja active Pending