JPS6163835U - - Google Patents
Info
- Publication number
- JPS6163835U JPS6163835U JP14781884U JP14781884U JPS6163835U JP S6163835 U JPS6163835 U JP S6163835U JP 14781884 U JP14781884 U JP 14781884U JP 14781884 U JP14781884 U JP 14781884U JP S6163835 U JPS6163835 U JP S6163835U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- drying
- rotary table
- vacuum
- porous sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 4
Landscapes
- Drying Of Solid Materials (AREA)
Description
第１図及び第２図は本考案の一実施例を示す要
部側面図及び平面図、第３図及び第４図は従来の
半導体ウエーハ乾燥装置の要部側面図及び平面図
である。
１…回転テーブル、２…半導体ウエーハ、４…
多孔質シート。
1 and 2 are a side view and a plan view of a main part showing an embodiment of the present invention, and FIGS. 3 and 4 are a side view and a plan view of a main part of a conventional semiconductor wafer drying apparatus. 1...Rotary table, 2...Semiconductor wafer, 4...
Porous sheet.
Claims (1)
真空吸着させて回転させ遠心乾燥させる装置にお
いて、前記回転テーブル上に多孔質シートを介し
半導体ウエーハを真空吸着させたことを特徴とす
る半導体ウエーハ乾燥装置。 A semiconductor wafer drying device for drying a cleaned semiconductor wafer by vacuum suction on a rotary table and rotating it for centrifugal drying, characterized in that the semiconductor wafer is vacuum suctioned onto the rotary table through a porous sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14781884U JPS6163835U (en) | 1984-09-29 | 1984-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14781884U JPS6163835U (en) | 1984-09-29 | 1984-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6163835U true JPS6163835U (en) | 1986-04-30 |
Family
ID=30706043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14781884U Pending JPS6163835U (en) | 1984-09-29 | 1984-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6163835U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493029A (en) * | 1972-04-27 | 1974-01-11 | ||
| JPS5374374A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Rotary vacuum chuck table |
-
1984
- 1984-09-29 JP JP14781884U patent/JPS6163835U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS493029A (en) * | 1972-04-27 | 1974-01-11 | ||
| JPS5374374A (en) * | 1976-12-15 | 1978-07-01 | Hitachi Ltd | Rotary vacuum chuck table |