JPS6231973U - - Google Patents
Info
- Publication number
- JPS6231973U JPS6231973U JP12096185U JP12096185U JPS6231973U JP S6231973 U JPS6231973 U JP S6231973U JP 12096185 U JP12096185 U JP 12096185U JP 12096185 U JP12096185 U JP 12096185U JP S6231973 U JPS6231973 U JP S6231973U
- Authority
- JP
- Japan
- Prior art keywords
- spin
- coating device
- spin chuck
- cup
- cleaning ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の塗布装置のスピンカツプ部の
概略図、第２図は従来の塗布装置のスピンカツプ
部の概略図である。
１……半導体ウエーハ、２……回転チヤツク、
３……スピンカツプ、４……チヤツク回転用モー
ター、５……カツプ洗浄用リング、６……カツプ
洗浄用リング、７……洗浄用リング回転モーター
、８……シリンダー。
FIG. 1 is a schematic diagram of a spin cup portion of a coating device according to the present invention, and FIG. 2 is a schematic diagram of a spin cup portion of a conventional coating device. 1... Semiconductor wafer, 2... Rotating chuck,
3...Spin cup, 4...Chuck rotation motor, 5...Cup cleaning ring, 6...Cup cleaning ring, 7...Cleaning ring rotation motor, 8...Cylinder.
Claims (1)
チヤツクの外周部に、多孔を有するスピンカツプ
洗浄用リングをスピンチヤツク軸回りに回転可能
に、かつ軸方向に上下動可能に設置したことを特
徴とする塗布装置。 A coating device characterized in that a spin cup cleaning ring having porous holes is installed on the outer periphery of the spin chuck in a spin cup of the coating device so as to be rotatable around the spin chuck axis and movable up and down in the axial direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096185U JPS6231973U (en) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096185U JPS6231973U (en) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6231973U true JPS6231973U (en) | 1987-02-25 |
Family
ID=31009774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12096185U Pending JPS6231973U (en) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6231973U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282819A (en) * | 1988-05-09 | 1989-11-14 | Nec Corp | Spin coater |
| JPH06106126A (en) * | 1992-09-29 | 1994-04-19 | Dainippon Screen Mfg Co Ltd | Rotary coating device |
-
1985
- 1985-08-07 JP JP12096185U patent/JPS6231973U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01282819A (en) * | 1988-05-09 | 1989-11-14 | Nec Corp | Spin coater |
| JPH06106126A (en) * | 1992-09-29 | 1994-04-19 | Dainippon Screen Mfg Co Ltd | Rotary coating device |