JPH0290843U - - Google Patents
Info
- Publication number
- JPH0290843U JPH0290843U JP17020788U JP17020788U JPH0290843U JP H0290843 U JPH0290843 U JP H0290843U JP 17020788 U JP17020788 U JP 17020788U JP 17020788 U JP17020788 U JP 17020788U JP H0290843 U JPH0290843 U JP H0290843U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- tank
- cup
- top surface
- sub
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Description
第１図Ａ，Ｂは従来装置を示すものでＡは斜視
図、Ｂは第１図のＸ−Ｘ線部分断面図、第２図は
本考案装置の全体斜視図、第３図は第２図のＹ−
Ｙ線部分断面図である。
１……カツプ、３……薬液供給口（ノズル）、
５……スピンドルチヤツク、６……被現像物、７
……薬液サブタンク、８……覆板、９……スリツ
ト、１０……止着ボルト。
1A and 1B show a conventional device, where A is a perspective view, B is a partial sectional view taken along the line X-X in FIG. Y- in the diagram
It is a partial sectional view taken along the Y line. 1... Cup, 3... Chemical solution supply port (nozzle),
5...Spindle chuck, 6...Object to be developed, 7
...Medical liquid sub-tank, 8...Cover plate, 9...Slit, 10...Fixing bolt.
Claims (1)
するための薬液サブタンクを設け、該薬液サブタ
ンク上面には覆板を取付け、薬液サブタンク上面
からカツプ内底面へ向けて薬液を下降流入させる
ための供給スリツトを形成したことを特徴とする
デイツプ現像用カツプ。 A chemical liquid sub-tank is provided on the outer circumferential surface of the cup to temporarily store the chemical liquid, and a cover plate is attached to the top surface of the chemical liquid sub-tank to supply the chemical liquid to flow downward from the top surface of the chemical liquid sub-tank toward the inner bottom surface of the cup. A deep developing cup characterized by having a slit formed therein.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170207U JPH0425704Y2 (en) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988170207U JPH0425704Y2 (en) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290843U true JPH0290843U (en) | 1990-07-18 |
| JPH0425704Y2 JPH0425704Y2 (en) | 1992-06-19 |
Family
ID=31460952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988170207U Expired JPH0425704Y2 (en) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425704Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63168026A (en) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | Developer |
-
1988
- 1988-12-30 JP JP1988170207U patent/JPH0425704Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63168026A (en) * | 1986-12-29 | 1988-07-12 | Tokyo Electron Ltd | Developer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425704Y2 (en) | 1992-06-19 |