JPH0425704Y2 - - Google Patents

Description

[Detailed explanation of the idea] (Industrial application field) The present invention relates to a dip developing cup.

(Prior Art) The structure of the chemical solution supply port in a conventional dip developing cup is as shown in FIG. 1A (perspective view) and FIG. A plurality of chemical solution supply ports (hereinafter referred to as nozzles) 3 were provided at appropriate intervals near the circumferential wall of the bottom surface 2, through which a developing chemical solution 4 was allowed to flow. In addition, 5 in the drawing is a spindle chuck.

(Problems to be Solved by the Invention) In the conventional device described above, the developing chemical 4 flowing onto the upper surface of the mask or wafer (hereinafter referred to as the object to be developed) 6 set in the cup 1 is in the vicinity of each nozzle 3. Because the resist flows onto the object 6 to be developed faster than other parts, variations occur in the resist development speed.

Therefore, it has been considered to increase the number of nozzles 3 or to increase the speed of the chemical to each nozzle 3 in order to quickly flow the chemical onto the upper surface of the object to be developed 6 in the cup. In the former case, there are problems such as an increase in the number of piping, and in the latter case, there are problems such as the generation of bubbles near the nozzle of the inflowing chemical liquid and pulsation of the liquid level.

(Means for solving the problem) The present invention is an attempt to solve the above problem, and its feature is that a chemical liquid sub-tank is provided on the outer circumferential surface of the cup to temporarily store the chemical liquid. A cover plate is attached to the upper surface of the chemical liquid sub-tank, and a supply slit is formed for allowing the chemical liquid to flow downward from the upper surface of the chemical liquid sub-tank toward the inner bottom surface of the cup.

The invention is illustrated by the following examples.

(Example) Figure 2 is an overall perspective view, Figure 3 is Y-Y in Figure 2.
It is a line partial sectional view.

In this figure, 1 is a developing cup, 2 is the inner bottom surface of the cup, 4 is a developing chemical, 5 is a spindle chuck, and 6 is a mask (or wafer), which is the same as in the conventional one. In the present invention, the chemical liquid sub-tank 7 is provided on the outer circumferential surface of the cup 1, and this formation is performed by attaching the cup 1 to the outer peripheral surface of the cup 1.
The circumferential side wall of the tank may be formed thick and the tank container 7a may be formed inside the wall, but separate parts may also be attached integrally.

Here, the outer upper surface m of the chemical liquid sub-tank 7 is located a little higher than the upper surface n of the inner wall of the cup, and a cover plate 8 of a constant width is attached from the upper surface m toward the inner surface of the cup, the edge of which reaches inside the cup. Moreover, the tip thereof is formed into an inclined surface g that enters into the cup, so that a slit 9 is formed between it and the inner wall surface of the cup through which the medicinal solution from the sub-tank flows downward. In the drawing, 10 is a bolt for fixing the cover plate 8, and 11 is a chemical liquid supply pipe.

(Function) In the above structure, the chemical liquid sub-tank 7 has a volume larger than the amount of chemical liquid used for one dip development, and the chemical liquid 4 flows from the supply pipe 11, and when the liquid level rises in the sub-tank 7, the liquid level rises above the liquid level. It descends toward the inner bottom of the cup from the slit 9 formed between it and the cover plate 8.

(Effect of the invention) According to the invention, the chemical liquid flows uniformly from the entire upper part of the chemical liquid sub-tank formed on the inner circumferential surface of the cup toward the inner bottom surface of the cup. The set object 6 to be developed is gently impregnated with the chemical solution, thereby completely eliminating development problems such as the generation of bubbles and pulsation of the chemical solution, which have been observed in the past.
Moreover, it will greatly contribute to improving the quality of the object 6 to be developed.

[Brief explanation of the drawing]

1A and 1B show a conventional device, A is a perspective view, B is a partial sectional view taken along the line X-X in FIG. 1, FIG. 2 is an overall perspective view of the device of the present invention, and FIG. Y- in the diagram
It is a partial sectional view taken along the Y line. 1... Cup, 3... Chemical solution supply port (nozzle),
5...Spindle chuck, 6...Object to be developed, 7
...Medical liquid sub-tank, 8...Cover plate, 9...Slit, 10...Fixing bolt.

Claims (1)

[Scope of utility model registration request] A chemical liquid sub-tank is provided on the outer circumferential surface of the cup to temporarily store the chemical liquid, and a cover plate is attached to the top surface of the chemical liquid sub-tank to supply the chemical liquid to flow downward from the top surface of the chemical liquid sub-tank toward the inner bottom surface of the cup. A deep developing cup characterized by having a slit formed therein.