JPS63105334U

JPS63105334U -

Info

Publication number: JPS63105334U
Application number: JP19972086U
Authority: JP
Priority date: 1986-12-25
Filing date: 1986-12-25
Publication date: 1988-07-08

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例に係る移替機の全体
を示す概略構成図、第２ａ図〜第２ｆ図は同移替
機の動作を順次説明する説明図、第３図はピツチ
変換機構部の概略部分説明図、第４ａ図はピツチ
変換機構部のシヤフトが上昇した状態の要部断面
図、第４ｂ図はピツチ変換機構部のシヤフトが下
降した状態の要部断面図、第５図は従来例の概略
構成図である。１Ａ，１Ｂ……半導体ウエハ保持部、２……半
導体ウエハ、４……ピツチ変換機構部、６……第
一の移行手段、７……第二の移行手段。 Fig. 1 is a schematic configuration diagram showing the entire transfer machine according to an embodiment of the present invention, Figs. 2a to 2f are explanatory diagrams sequentially explaining the operation of the transfer machine, and Fig. 3 is pitch conversion. A schematic partial explanatory diagram of the mechanism section, Fig. 4a is a sectional view of the main part of the pitch conversion mechanism section with the shaft raised, Fig. 4b is a sectional view of the main part of the pitch conversion mechanism section with the shaft lowered, and Fig. 5 The figure is a schematic configuration diagram of a conventional example. 1A, 1B...Semiconductor wafer holding section, 2...Semiconductor wafer, 4...Pitch conversion mechanism section, 6...First transfer means, 7...Second transfer means.

Claims

[Scope of utility model registration request]

A pitch conversion mechanism section is provided between both semiconductor wafer holding sections that hold semiconductor wafers at different pitches,
A first transfer means for transferring a semiconductor wafer held by one of the semiconductor wafer holding sections to the pitch conversion mechanism section; and a first transfer means for transferring the semiconductor wafer transferred to the pitch conversion mechanism section to the other semiconductor wafer holding section. A semiconductor wafer transfer machine with a pitch conversion mechanism, characterized in that it is provided with two transfer means.