JPH0288U - - Google Patents
Info
- Publication number
- JPH0288U JPH0288U JP7366688U JP7366688U JPH0288U JP H0288 U JPH0288 U JP H0288U JP 7366688 U JP7366688 U JP 7366688U JP 7366688 U JP7366688 U JP 7366688U JP H0288 U JPH0288 U JP H0288U
- Authority
- JP
- Japan
- Prior art keywords
- transfer arm
- wafer
- wafer transfer
- rotating
- split
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例によるウエハ搬送
アームを示す断面図、第２図は従来のウエハ搬送
アームを示す断面図、第３図はウエハ搬送アーム
の動作説明のための平面図である。
図中、１はウエハ、３は回転軸、７は搬送アー
ム、７ｃは接続穴、８はボルトである。なお、図
中同一符号は同一又は相当部分を示す。
FIG. 1 is a sectional view showing a wafer transfer arm according to an embodiment of this invention, FIG. 2 is a sectional view showing a conventional wafer transfer arm, and FIG. 3 is a plan view for explaining the operation of the wafer transfer arm. . In the figure, 1 is a wafer, 3 is a rotating shaft, 7 is a transfer arm, 7c is a connection hole, and 8 is a bolt. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
有して該ウエハをセンタロツド間に回転移載する
ようにしたウエハ搬送アームにおいて、ウエハ搬
送アームを分割構造にするとともに、その分割連
結部に長さ調整機構を備えたことを特徴とするウ
エハ搬送アーム。 In a wafer transfer arm that is connected to a rotating shaft and has a wafer placement portion at its tip for rotating and transferring the wafer between center rods, the wafer transfer arm has a split structure, and the split connection portion A wafer transfer arm characterized by having a length adjustment mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7366688U JPH0288U (en) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7366688U JPH0288U (en) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0288U true JPH0288U (en) | 1990-01-05 |
Family
ID=31298801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7366688U Pending JPH0288U (en) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0288U (en) |
-
1988
- 1988-06-02 JP JP7366688U patent/JPH0288U/ja active Pending
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