JPS6088338U - photo mask - Google Patents

photo mask

Info

Publication number
JPS6088338U
JPS6088338U JP1983179872U JP17987283U JPS6088338U JP S6088338 U JPS6088338 U JP S6088338U JP 1983179872 U JP1983179872 U JP 1983179872U JP 17987283 U JP17987283 U JP 17987283U JP S6088338 U JPS6088338 U JP S6088338U
Authority
JP
Japan
Prior art keywords
photo mask
photomask
lid
utility
surface side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983179872U
Other languages
Japanese (ja)
Inventor
尚博 清水
正隆 大場
Original Assignee
東洋電機製造株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東洋電機製造株式会社 filed Critical 東洋電機製造株式会社
Priority to JP1983179872U priority Critical patent/JPS6088338U/en
Publication of JPS6088338U publication Critical patent/JPS6088338U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ａ、　ｂは従来のものの一例を示し、ａ図および
ｂ図はその平面図および正面図、第２図ａ、　ｂは本考
案にかかるフォトマスクの一実施例を示し、ａ図および
ｂ図はその平面図および正面図である。 １・・・・・・ウェハ、２，２′・・・・・・露光ギャ
ップ体、３・・・・・・パターン。1A and 1B show an example of a conventional photomask, FIGS. 1A and 2B show a plan view and a front view thereof, and FIGS. Figure b is a plan view and a front view thereof. 1...Wafer, 2,2'...Exposure gap body, 3...Pattern.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体のウェハのパターン化に用いられるフォトマスク
において、該フォトマスクの前記ウェハ面側に露光ギャ
ップを蒸着せしめたふとを特徴とするフォトマスク。1. A photomask used for patterning semiconductor wafers, characterized by a lid having an exposure gap deposited on the wafer surface side of the photomask.
JP1983179872U 1983-11-21 1983-11-21 photo mask Pending JPS6088338U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983179872U JPS6088338U (en) 1983-11-21 1983-11-21 photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983179872U JPS6088338U (en) 1983-11-21 1983-11-21 photo mask

Publications (1)

Publication Number Publication Date
JPS6088338U true JPS6088338U (en) 1985-06-17

Family

ID=30390154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983179872U Pending JPS6088338U (en) 1983-11-21 1983-11-21 photo mask

Country Status (1)

Country Link
JP (1) JPS6088338U (en)

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