JPS59146944U - wahachishaku base - Google Patents
wahachishaku baseInfo
- Publication number
- JPS59146944U JPS59146944U JP3959683U JP3959683U JPS59146944U JP S59146944 U JPS59146944 U JP S59146944U JP 3959683 U JP3959683 U JP 3959683U JP 3959683 U JP3959683 U JP 3959683U JP S59146944 U JPS59146944 U JP S59146944U
- Authority
- JP
- Japan
- Prior art keywords
- base
- wahachishaku
- wafer
- edge portion
- chuck base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハチャック基台の平面図及び断面側
面図、第２図ａ ”−ｅは従来のウェハチャック基台の
ウェハエッヂ部を示す断面図、第３図は本考案の一実施
例の平面図及び断面側面図、第４図ａ−ｃは本考案を実
施したウェハチャック基台のウェハエッヂ部を示す断面
図である。
１・・・プレート、２・・・孔、３・・・ウェハ、４・
・・異物、５・・・溝。Figure 1 is a plan view and a cross-sectional side view of a conventional wafer chuck base, Figure 2 a''-e is a cross-sectional view showing the wafer edge portion of a conventional wafer chuck base, and Figure 3 is an embodiment of the present invention. 4A to 4C are cross-sectional views showing the wafer edge portion of the wafer chuck base in which the present invention is implemented. Wafer, 4.
... Foreign matter, 5... Groove.
Claims (1)
イナのウェハチャック基台において、装着されるウェハ
のエッヂ部分が位置するプレート上面に溝を設けたこと
を特徴とするウェハチャック基台。A wafer chuck base for a mask aligner used for forming fine patterns of semiconductor integrated circuits, characterized in that a groove is provided in the upper surface of a plate where an edge portion of a wafer to be mounted is located.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3959683U JPS59146944U (en) | 1983-03-22 | 1983-03-22 | wahachishaku base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3959683U JPS59146944U (en) | 1983-03-22 | 1983-03-22 | wahachishaku base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59146944U true JPS59146944U (en) | 1984-10-01 |
Family
ID=30170234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3959683U Pending JPS59146944U (en) | 1983-03-22 | 1983-03-22 | wahachishaku base |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59146944U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1050810A (en) * | 1997-04-07 | 1998-02-20 | Nikon Corp | Suction device for substrate and aligner |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5936245B2 (en) * | 1977-07-20 | 1984-09-03 | インタ−ナショナル・スタンダ−ド・エレクトリック・コ−ポレ−ション | Nematic liquid crystal display cell |
-
1983
- 1983-03-22 JP JP3959683U patent/JPS59146944U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5936245B2 (en) * | 1977-07-20 | 1984-09-03 | インタ−ナショナル・スタンダ−ド・エレクトリック・コ−ポレ−ション | Nematic liquid crystal display cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1050810A (en) * | 1997-04-07 | 1998-02-20 | Nikon Corp | Suction device for substrate and aligner |
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