JPS5823330U - photo mask - Google Patents

photo mask

Info

Publication number
JPS5823330U
JPS5823330U JP1981118201U JP11820181U JPS5823330U JP S5823330 U JPS5823330 U JP S5823330U JP 1981118201 U JP1981118201 U JP 1981118201U JP 11820181 U JP11820181 U JP 11820181U JP S5823330 U JPS5823330 U JP S5823330U
Authority
JP
Japan
Prior art keywords
photo mask
glass plate
utility
forming
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981118201U
Other languages
Japanese (ja)
Inventor
鈴木 淑希
山崎 照彦
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP1981118201U priority Critical patent/JPS5823330U/en
Publication of JPS5823330U publication Critical patent/JPS5823330U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来のフォトマスクの平面図、第2図は本考案
の一実施例の平面図である。 図において、1aはガラス板、2はパターンである。な
お、図中同一符号は同一または相当部分を示す
FIG. 1 is a plan view of a conventional photomask, and FIG. 2 is a plan view of an embodiment of the present invention. In the figure, 1a is a glass plate and 2 is a pattern. In addition, the same symbols in the figures indicate the same or equivalent parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 外形が入角形のガラス平板の表面に所要の不透明パター
ンを形成してなることを特徴とするフォトマスク。
A photomask characterized by forming a desired opaque pattern on the surface of a flat glass plate having a rectangular outer shape.
JP1981118201U 1981-08-07 1981-08-07 photo mask Pending JPS5823330U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981118201U JPS5823330U (en) 1981-08-07 1981-08-07 photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981118201U JPS5823330U (en) 1981-08-07 1981-08-07 photo mask

Publications (1)

Publication Number Publication Date
JPS5823330U true JPS5823330U (en) 1983-02-14

Family

ID=29912342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981118201U Pending JPS5823330U (en) 1981-08-07 1981-08-07 photo mask

Country Status (1)

Country Link
JP (1) JPS5823330U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5217815A (en) * 1975-07-30 1977-02-10 Fuji Photo Film Co Ltd Substrate and material using the same
JPS5623490B2 (en) * 1975-10-29 1981-06-01
JPS5623940B2 (en) * 1975-06-10 1981-06-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623940B2 (en) * 1975-06-10 1981-06-03
JPS5217815A (en) * 1975-07-30 1977-02-10 Fuji Photo Film Co Ltd Substrate and material using the same
JPS5623490B2 (en) * 1975-10-29 1981-06-01

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