JPS6068636U - reticle mask - Google Patents

reticle mask

Info

Publication number
JPS6068636U
JPS6068636U JP1983160676U JP16067683U JPS6068636U JP S6068636 U JPS6068636 U JP S6068636U JP 1983160676 U JP1983160676 U JP 1983160676U JP 16067683 U JP16067683 U JP 16067683U JP S6068636 U JPS6068636 U JP S6068636U
Authority
JP
Japan
Prior art keywords
reticle mask
reticle
axis
pattern
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983160676U
Other languages
Japanese (ja)
Inventor
池田　重
Original Assignee
沖電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 沖電気工業株式会社 filed Critical 沖電気工業株式会社
Priority to JP1983160676U priority Critical patent/JPS6068636U/en
Publication of JPS6068636U publication Critical patent/JPS6068636U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案レディクルマスクの一実施例を示す平面図で
ある。 １・・・・・・レティクルマスク、２・・川・レティク
ルパターン、３・・・・・・欠陥、４・・・・・・欠陥
確認パターン。The figure is a plan view showing an embodiment of the redicle mask of the present invention. 1... Reticle mask, 2... River reticle pattern, 3... Defect, 4... Defect confirmation pattern.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] レティクルパターン以外の部分にＸ軸、Ｙ軸に平行に欠
陥確認パターンを設けたことを特徴とするレティクルマ
スク。A reticle mask characterized in that a defect confirmation pattern is provided in a portion other than the reticle pattern in parallel to the X-axis and Y-axis.
JP1983160676U 1983-10-19 1983-10-19 reticle mask Pending JPS6068636U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983160676U JPS6068636U (en) 1983-10-19 1983-10-19 reticle mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983160676U JPS6068636U (en) 1983-10-19 1983-10-19 reticle mask

Publications (1)

Publication Number Publication Date
JPS6068636U true JPS6068636U (en) 1985-05-15

Family

ID=30353337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983160676U Pending JPS6068636U (en) 1983-10-19 1983-10-19 reticle mask

Country Status (1)

Country Link
JP (1) JPS6068636U (en)

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