JPS59115648U - Semiconductor wafer transfer equipment - Google Patents
Semiconductor wafer transfer equipmentInfo
- Publication number
- JPS59115648U JPS59115648U JP933183U JP933183U JPS59115648U JP S59115648 U JPS59115648 U JP S59115648U JP 933183 U JP933183 U JP 933183U JP 933183 U JP933183 U JP 933183U JP S59115648 U JPS59115648 U JP S59115648U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer transfer
- boat
- transfer equipment
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の半導体ウェハ移替装置を示す側面図、第
２図は第１図のボートおよび収納された半導体ウェハを
示す斜視図、第３図は第１図のカセットおよび収納され
た半導体ウェハを示す斜視図、第４図は第１図の上レー
ルおよび下レールのレール取付板への取付状態を示す側
面図、第５図はこの考案に係る半導体ウェハ移替装置の
一実施例を示す側面図、第６図は第５図の一部詳細な側
面図である。
１および１ａ・・・・・・半導体ウェハ、２・・・・・
・ボート、３・・・・・・カセット、４・・・・・・ス
ライダ、５・・・・・・ローラ、６・・・・・・直進プ
ッシャー、７・・・・・・ボート送り部、８・・・・・
・支持板、９・・・・・・ボート受、１０・・・・・・
アーム、１１・・・・・・ローラ、１２・・・・・・揺
動駆動部、１３・・・・・・軸、１４・・・・・・上レ
ール、１５・・・・・・下レール、１６・・・・・・レ
ール取付板、１７・・・・・・チャック、１８・・・・
・・カセット送り部、１９・・・・・・軸、２０・・・
・・・センサ、２１・・・・・・光線。なお、図中、同
一符号は同一または相当部分を示す。FIG. 1 is a side view showing a conventional semiconductor wafer transfer device, FIG. 2 is a perspective view showing the boat shown in FIG. 1 and the semiconductor wafers stored therein, and FIG. 3 is a cassette shown in FIG. 1 and the semiconductors stored therein. FIG. 4 is a perspective view showing a wafer, FIG. 4 is a side view showing how the upper rail and lower rail of FIG. 1 are attached to the rail mounting plate, and FIG. The side view shown in FIG. 6 is a partially detailed side view of FIG. 5. 1 and 1a... Semiconductor wafer, 2...
・Boat, 3... Cassette, 4... Slider, 5... Roller, 6... Straight pusher, 7... Boat feed section , 8...
・Support plate, 9...Boat holder, 10...
Arm, 11...roller, 12...swing drive section, 13...shaft, 14...upper rail, 15...lower Rail, 16...Rail mounting plate, 17...Chuck, 18...
...Cassette feed section, 19...shaft, 20...
...Sensor, 21...Light beam. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
送り出す第１の移送部と、このレールから半導体ウェハ
をボートに送り込む第２の移送部とを備えた半導体ウェ
ハ移替装置において、前記第２の移送部のスライダに、
ボートに移替えられた最新の半導体ウェハの直立収納を
検出するセンサを設け、スライダの前進過程で、この移
替完了した最新の半導体ウェハのボートへの収納状態を
判別する半導体ウェハ移替装置。In the semiconductor wafer transfer device, the semiconductor wafer transfer device includes a first transfer section that transfers semiconductor wafers one by one from a cassette to a transfer rail, and a second transfer section that transfers semiconductor wafers from this rail to a boat. On the slider of the transfer section,
This semiconductor wafer transfer device is provided with a sensor that detects the upright storage of the latest semiconductor wafer transferred to a boat, and determines the storage state of the latest semiconductor wafer that has been transferred in the boat during the advancement process of a slider.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP933183U JPS59115648U (en) | 1983-01-24 | 1983-01-24 | Semiconductor wafer transfer equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP933183U JPS59115648U (en) | 1983-01-24 | 1983-01-24 | Semiconductor wafer transfer equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59115648U true JPS59115648U (en) | 1984-08-04 |
Family
ID=30140796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP933183U Pending JPS59115648U (en) | 1983-01-24 | 1983-01-24 | Semiconductor wafer transfer equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59115648U (en) |
-
1983
- 1983-01-24 JP JP933183U patent/JPS59115648U/en active Pending
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