JPS6153932U - - Google Patents
Info
- Publication number
- JPS6153932U JPS6153932U JP13730984U JP13730984U JPS6153932U JP S6153932 U JPS6153932 U JP S6153932U JP 13730984 U JP13730984 U JP 13730984U JP 13730984 U JP13730984 U JP 13730984U JP S6153932 U JPS6153932 U JP S6153932U
- Authority
- JP
- Japan
- Prior art keywords
- pellets
- pellet
- position information
- mounting
- necessary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Die Bonding (AREA)
Description
第１図は本考案の実施例を示す制御系の構成図
、第２図は本考案の実施例を示す１人で複数台の
装置を操作する時のペレツト目合せとマウント動
作とのタイミングを示すタイミング線図、第３図
は従来のペレツトマウント装置を示す斜視図、第
４図は従来の装置のペレツト目合せとマウント動
作とのタイミングを示すタイミング線図である。
１…コレツト、３…ペレツト、４…Ｘ−Ｙテー
ブル、５…回転台、８−１〜８−４…ペレツト位
置合せ、９−１〜９−４…マウント動作、１０…
Ｘ−Ｙテーブル移動量検出装置、１１…回転台回
転量検出装置、１２…記憶回路装置。
Fig. 1 is a configuration diagram of a control system showing an embodiment of the present invention, and Fig. 2 shows an embodiment of the present invention showing the timing of pellet alignment and mounting operations when one person operates multiple devices. FIG. 3 is a perspective view of a conventional pellet mounting device, and FIG. 4 is a timing diagram showing the timing of pellet alignment and mounting operations of the conventional device. 1...Collection, 3...Pellet, 4...X-Y table, 5...Turnable table, 8-1 to 8-4...Pellet positioning, 9-1 to 9-4...Mount operation, 10...
X-Y table movement amount detection device, 11...Rotary table rotation amount detection device, 12...Storage circuit device.
Claims (1)
トするコレツトと、トレイ又はウエハリングに貼
着されたペレツトとの位置合せに必要な縦、横並
びに角度のずれを調整するＸ−Ｙテーブルと回転
台とをそれぞれ備えたペレツトマウント装置にお
いて、コレツトに対する各ペレツトの位置合せ工
程における各ペレツトの位置についてのＸ−Ｙテ
ーブルの移動量と回転台の回転量とを各々のペレ
ツトの位置情報として検出する検出装置と、複数
のペレツトの各々についての位置情報を順次記憶
し、後のペレツトのマウント工程時にペレツトの
位置情報を出力する記憶回路装置と、該記憶回路
装置よりの出力を受けて各ペレツトのマウントに
必要な制御を順次行うマウント動作制御装置とを
有することを特徴とする半導体製造装置。 A collet that suctions and transports pellets and mounts them on a substrate, etc., and an X-Y table and rotary table that adjust the vertical, horizontal, and angular misalignment necessary to align the pellets attached to the tray or wafer ring. In a pellet mounting device equipped with a detection device, a memory circuit device that sequentially stores position information for each of a plurality of pellets and outputs the pellet position information during a subsequent pellet mounting process; A semiconductor manufacturing apparatus comprising: a mount operation control device that sequentially performs control necessary for mounting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13730984U JPS6153932U (en) | 1984-09-11 | 1984-09-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13730984U JPS6153932U (en) | 1984-09-11 | 1984-09-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6153932U true JPS6153932U (en) | 1986-04-11 |
Family
ID=30695722
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13730984U Pending JPS6153932U (en) | 1984-09-11 | 1984-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6153932U (en) |
-
1984
- 1984-09-11 JP JP13730984U patent/JPS6153932U/ja active Pending
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