JPS5815654U - Vacuum deposition equipment - Google Patents
Vacuum deposition equipmentInfo
- Publication number
- JPS5815654U JPS5815654U JP10940781U JP10940781U JPS5815654U JP S5815654 U JPS5815654 U JP S5815654U JP 10940781 U JP10940781 U JP 10940781U JP 10940781 U JP10940781 U JP 10940781U JP S5815654 U JPS5815654 U JP S5815654U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum evaporation
- vacuum deposition
- dome
- planetary
- deposition equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ａ、 ｂは従来の真空蒸着装置を示す正面図及
び平面図、第２図は金属蒸着膜がシリコン基板及びシリ
コン酸化膜等を蒸着する状態図、第３図は本考案の一実
施例を示す斜視図、第４図は本考案の一実施例のプラネ
タリとハンガを示す斜視図及び側面図、第５図ａは本考
案の一実施例のカムとハンガとの結合部を示す拡大図、
第５図す。
ｃ、 ｄは第５図ａの一部分の拡大図、第６図は本考
案の一実施例の動作の説明図、第７図乃至第９図は本考
案の他の実施例の斜視図である。
１・・・・・・アーム、２・・・・・・レール、５・・
・・・・ドーム、８・・・・・・カム、１４・・・・・
・ボールベアリング。Figures 1a and b are front and plan views showing a conventional vacuum evaporation apparatus, Figure 2 is a state diagram in which a metal evaporation film is deposited on a silicon substrate, a silicon oxide film, etc., and Figure 3 is an example of an implementation of the present invention. FIG. 4 is a perspective view and side view showing a planetary and a hanger according to an embodiment of the present invention; FIG. figure,
Figure 5. c and d are enlarged views of a portion of Fig. 5a, Fig. 6 is an explanatory diagram of the operation of one embodiment of the present invention, and Figs. . 1...Arm, 2...Rail, 5...
...Dome, 8...Cam, 14...
·ball bearing.
Claims (4)
ドームの傾斜角を変化させる手段を有することを特徴と
する真空蒸着装置。(1) A vacuum evaporation apparatus characterized by having means for changing the inclination angle of a planetary dome that rotates and revolves within a vacuum chamber.
より移動させる手段を有することを特徴とする実用新案
登録請求の範囲第１項記載の真空蒸着装置。(2) The vacuum evaporation apparatus according to claim 1, wherein the means includes means for moving the support arm of the planetary by means of a cam.
ールを有し、該レールはドームを上下動させる形状のも
のから成ることを特徴とする実用新案登録請求の範囲第
１項記載の真空蒸着装置。(3) The vacuum evaporation apparatus according to claim 1, wherein the means has a rail for supporting the planetary dome, and the rail is shaped to move the dome up and down. .
れていて、該ボールベアリングを介して前記アームを移
動させるようになっていることを特徴とする実用新案登
録請求の範囲第２項記載の真空蒸着装置。(4) The vacuum evaporation method according to claim 2 of the utility model registration, characterized in that a ball bearing is provided at the tip of the cam, and the arm is moved via the ball bearing. Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10940781U JPS5815654U (en) | 1981-07-23 | 1981-07-23 | Vacuum deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10940781U JPS5815654U (en) | 1981-07-23 | 1981-07-23 | Vacuum deposition equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5815654U true JPS5815654U (en) | 1983-01-31 |
Family
ID=29903786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10940781U Pending JPS5815654U (en) | 1981-07-23 | 1981-07-23 | Vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815654U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170018394A (en) * | 2014-06-13 | 2017-02-17 | 오스람 옵토 세미컨덕터스 게엠베하 | Method for producing a coating and optoelectronic semiconductor component having a coating |
-
1981
- 1981-07-23 JP JP10940781U patent/JPS5815654U/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20170018394A (en) * | 2014-06-13 | 2017-02-17 | 오스람 옵토 세미컨덕터스 게엠베하 | Method for producing a coating and optoelectronic semiconductor component having a coating |
| KR20220110335A (en) * | 2014-06-13 | 2022-08-05 | 에이엠에스-오스람 인터내셔널 게엠베하 | Method for producing a coating and optoelectronic semiconductor component having a coating |
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