JPS6094660U - Resist coating equipment - Google Patents
Resist coating equipmentInfo
- Publication number
- JPS6094660U JPS6094660U JP18594483U JP18594483U JPS6094660U JP S6094660 U JPS6094660 U JP S6094660U JP 18594483 U JP18594483 U JP 18594483U JP 18594483 U JP18594483 U JP 18594483U JP S6094660 U JPS6094660 U JP S6094660U
- Authority
- JP
- Japan
- Prior art keywords
- resist coating
- fixing means
- substrate
- coating equipment
- substrate fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のレジスト塗布装置を表わす断面図、第２
図Ａ及びＢは第１′図の装置によりレジスト塗布を行な
った基板を表わす平面図及びエツジ部断面図、第３図は
本考案の一実施例を表わす断面図、第４１ｆｆｌＡ及び
Ｂは第３図の装置によりレジスト塗、布を行ならた基板
を表わす平面図及び断面図である。２・・・回転軸、３
・・・基板、４・・・基板固着板、５・・・レジメチ溶
液用ノズル、１０・・・溶剤用ノズル。Figure 1 is a sectional view showing a conventional resist coating device, Figure 2 is a sectional view showing a conventional resist coating device.
Figures A and B are a plan view and an edge sectional view showing a substrate coated with resist using the apparatus shown in Figure 1', Figure 3 is a sectional view showing one embodiment of the present invention, and Figures 41fflA and B are FIG. 2 is a plan view and a cross-sectional view showing a substrate coated with resist and coated with the apparatus shown in the figure. 2...Rotating axis, 3
. . . Substrate, 4 . . . Substrate fixing plate, 5 .
Claims (1)
上方にレジスト溶液滴下用のノズルを備えたスピンナ方
式のレジスト塗布装置において、前記基板固着手段に固
着される基板の上方に、その基板の表面のエツジ部にレ
ジストを溶解する溶剤を供給する手段を備えたことを特
徴とするレジスト塗布装置。′In a spinner-type resist coating apparatus, which has a substrate fixing means at the upper end of the rotating shaft and a nozzle for dropping a resist solution above the substrate fixing means, the substrate fixed to the substrate fixing means is placed above the substrate fixing means. 1. A resist coating device comprising means for supplying a solvent for dissolving resist to an edge portion of a surface of a substrate. ′
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18594483U JPS6094660U (en) | 1983-12-01 | 1983-12-01 | Resist coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18594483U JPS6094660U (en) | 1983-12-01 | 1983-12-01 | Resist coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6094660U true JPS6094660U (en) | 1985-06-27 |
Family
ID=30401769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18594483U Pending JPS6094660U (en) | 1983-12-01 | 1983-12-01 | Resist coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6094660U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273440A (en) * | 1985-09-26 | 1987-04-04 | Sharp Corp | Optical memory element |
-
1983
- 1983-12-01 JP JP18594483U patent/JPS6094660U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273440A (en) * | 1985-09-26 | 1987-04-04 | Sharp Corp | Optical memory element |
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