JPS6161069U - - Google Patents
Info
- Publication number
- JPS6161069U JPS6161069U JP14219584U JP14219584U JPS6161069U JP S6161069 U JPS6161069 U JP S6161069U JP 14219584 U JP14219584 U JP 14219584U JP 14219584 U JP14219584 U JP 14219584U JP S6161069 U JPS6161069 U JP S6161069U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- rotating head
- supported
- coating liquid
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Description
第１図〜第３図はこの考案の第１の実施例を示
したもので、第１図および第２図はスピンコート
装置の平面図および縦断正面図、第３図は回転ヘ
ツドが回転していないときの補助部材の状態を示
す回転ヘツド部分の縦断正面図である。第４図お
よび第５図はこの考案の第２の実施例を示すスピ
ンコート装置の平面図および縦断正面図である。
第６図はこの考案の第３の実施例を示すスピンコ
ート装置の平面図である。第７図は従来のスピン
コート装置によつて塗布液を塗布された角形被塗
布部材の平面図である。
３…回転ヘツド、５…補助部材、Ａ…被塗布部
材。
Figures 1 to 3 show the first embodiment of this invention. Figures 1 and 2 are a plan view and a vertical front view of the spin coater, and Figure 3 is a rotating head of the spin coater. FIG. 6 is a longitudinal sectional front view of the rotary head portion showing the state of the auxiliary member when not in use. 4 and 5 are a plan view and a longitudinal sectional front view of a spin coating apparatus showing a second embodiment of this invention.
FIG. 6 is a plan view of a spin coater showing a third embodiment of this invention. FIG. 7 is a plan view of a rectangular coated member coated with a coating liquid by a conventional spin coater. 3... Rotating head, 5... Auxiliary member, A... Member to be coated.
Claims (1)
布部材を回転させて遠心力により塗布液を被塗布
部材の表面に塗布するスピンコート装置において
、被塗布部材を支持してこれを回転させる回転ヘ
ツドの周囲に、この回転ヘツドと一体回転し、か
つ前記回転ヘツド上に支持される被塗布部材の周
縁にこの被塗布部材の表面とほぼ面一に接触する
補助部材を設けたことを特徴とするスピンコート
装置。 In a spin coating device that drops a coating liquid onto the surface of a member to be coated, rotates the member, and applies the coating liquid to the surface of the member by centrifugal force, the member to be coated is supported and rotated. It is characterized by providing an auxiliary member around the rotating head, which rotates together with the rotating head and contacts the peripheral edge of the member to be coated, which is supported on the rotating head, almost flush with the surface of the member to be coated. Spin coating equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14219584U JPS6161069U (en) | 1984-09-21 | 1984-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14219584U JPS6161069U (en) | 1984-09-21 | 1984-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6161069U true JPS6161069U (en) | 1986-04-24 |
Family
ID=30700523
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14219584U Pending JPS6161069U (en) | 1984-09-21 | 1984-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6161069U (en) |
-
1984
- 1984-09-21 JP JP14219584U patent/JPS6161069U/ja active Pending
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