JPS58144830U - spin coater - Google Patents

spin coater

Info

Publication number
JPS58144830U
JPS58144830U JP4126382U JP4126382U JPS58144830U JP S58144830 U JPS58144830 U JP S58144830U JP 4126382 U JP4126382 U JP 4126382U JP 4126382 U JP4126382 U JP 4126382U JP S58144830 U JPS58144830 U JP S58144830U
Authority
JP
Japan
Prior art keywords
spin coater
substrate
container
coating liquid
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4126382U
Other languages
Japanese (ja)
Inventor
有井　勝之
真也 加藤
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP4126382U priority Critical patent/JPS58144830U/en
Publication of JPS58144830U publication Critical patent/JPS58144830U/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案の一実施例を示す構造図である。 図中、１は基板、２は基板回転部、３は塗布液供給部、
５は容器、６は内壁、７は孔、８は除去液供給部である
。The drawing is a structural diagram showing an embodiment of the present invention. In the figure, 1 is a substrate, 2 is a substrate rotation part, 3 is a coating liquid supply part,
5 is a container, 6 is an inner wall, 7 is a hole, and 8 is a removal liquid supply section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を支持し回転させる基板回転部、該基板に塗布液を
供給する塗布液供給部、該基板回転部を収容する容器を
具備し、さらに該容器の内壁が多孔構造をなし、該孔を
介して塗布液を除去する液体を供給する除去液供給部と
を具備してなることを特徴とするスピンコータ。A substrate rotation unit that supports and rotates the substrate, a coating liquid supply unit that supplies a coating liquid to the substrate, and a container that accommodates the substrate rotation unit, and the inner wall of the container has a porous structure, and the inner wall of the container has a porous structure. 1. A spin coater comprising: a removal liquid supply section that supplies a liquid for removing a coating liquid.
JP4126382U 1982-03-24 1982-03-24 spin coater Pending JPS58144830U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4126382U JPS58144830U (en) 1982-03-24 1982-03-24 spin coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4126382U JPS58144830U (en) 1982-03-24 1982-03-24 spin coater

Publications (1)

Publication Number Publication Date
JPS58144830U true JPS58144830U (en) 1983-09-29

Family

ID=30052449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4126382U Pending JPS58144830U (en) 1982-03-24 1982-03-24 spin coater

Country Status (1)

Country Link
JP (1) JPS58144830U (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48833U (en) * 1971-05-25 1973-01-08
JPS5372464A (en) * 1976-12-08 1978-06-27 Matsushita Electric Ind Co Ltd Method and apparatus for rotary coating
JPS5341068B2 (en) * 1974-05-27 1978-10-31

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48833U (en) * 1971-05-25 1973-01-08
JPS5341068B2 (en) * 1974-05-27 1978-10-31
JPS5372464A (en) * 1976-12-08 1978-06-27 Matsushita Electric Ind Co Ltd Method and apparatus for rotary coating

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