JPS58144829U - spin coater - Google Patents
spin coaterInfo
- Publication number
- JPS58144829U JPS58144829U JP4126282U JP4126282U JPS58144829U JP S58144829 U JPS58144829 U JP S58144829U JP 4126282 U JP4126282 U JP 4126282U JP 4126282 U JP4126282 U JP 4126282U JP S58144829 U JPS58144829 U JP S58144829U
- Authority
- JP
- Japan
- Prior art keywords
- coating liquid
- container
- substrate
- spin coater
- condensate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案の一実施例を示す構成図である。
図中、１は基板、２は基板面転部、３は塗布液供給部、
５は容器、６は凝縮液供給部、１１は分離部である。The drawing is a configuration diagram showing an embodiment of the present invention. In the figure, 1 is a substrate, 2 is a substrate surface rotation part, 3 is a coating liquid supply part,
5 is a container, 6 is a condensate supply section, and 11 is a separation section.
Claims (1)
供給する塗布液供給部、該基板回転部を収容する容器、
該容器内に設けられ該塗布液に対し非溶解の凝縮液を供
給する凝縮液供給部、該容器に付設され該塗布液及び凝
縮液を回収し塗布液を分離する分離部を具備することを
特徴とするスピンコータ。a substrate rotation unit that installs and rotates a substrate; a coating liquid supply unit that supplies a coating liquid to the substrate; a container that accommodates the substrate rotation unit;
A condensate supply section is provided in the container and supplies a condensate that is not dissolved in the coating liquid, and a separation section is attached to the container and collects the coating liquid and the condensate and separates the coating liquid. Features of spin coater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126282U JPS58144829U (en) | 1982-03-24 | 1982-03-24 | spin coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126282U JPS58144829U (en) | 1982-03-24 | 1982-03-24 | spin coater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144829U true JPS58144829U (en) | 1983-09-29 |
| JPS6210997Y2 JPS6210997Y2 (en) | 1987-03-16 |
Family
ID=30052448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4126282U Granted JPS58144829U (en) | 1982-03-24 | 1982-03-24 | spin coater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144829U (en) |
-
1982
- 1982-03-24 JP JP4126282U patent/JPS58144829U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6210997Y2 (en) | 1987-03-16 |
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