JPS5372464A - Method and apparatus for rotary coating - Google Patents

Method and apparatus for rotary coating

Info

Publication number
JPS5372464A
JPS5372464A JP14824376A JP14824376A JPS5372464A JP S5372464 A JPS5372464 A JP S5372464A JP 14824376 A JP14824376 A JP 14824376A JP 14824376 A JP14824376 A JP 14824376A JP S5372464 A JPS5372464 A JP S5372464A
Authority
JP
Japan
Prior art keywords
rotary coating
substrate
photo resist
readhering
repulsed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14824376A
Other languages
Japanese (ja)
Inventor
Shuji Kondo
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14824376A priority Critical patent/JPS5372464A/en
Publication of JPS5372464A publication Critical patent/JPS5372464A/en
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

PURPOSE: To prevent the photo resist from readhering to the substrate repulsed from the well and to form uniform resist film, by catching the photo resist removed and radiated from the circumference of substrate at the wall and melting immediately.
COPYRIGHT: (C)1978,JPO&Japio
JP14824376A 1976-12-08 1976-12-08 Method and apparatus for rotary coating Pending JPS5372464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14824376A JPS5372464A (en) 1976-12-08 1976-12-08 Method and apparatus for rotary coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14824376A JPS5372464A (en) 1976-12-08 1976-12-08 Method and apparatus for rotary coating

Publications (1)

Publication Number Publication Date
JPS5372464A true JPS5372464A (en) 1978-06-27

Family

ID=15448431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14824376A Pending JPS5372464A (en) 1976-12-08 1976-12-08 Method and apparatus for rotary coating

Country Status (1)

Country Link
JP (1) JPS5372464A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57135067A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Thin film-applying machine
JPS5863744U (en) * 1981-10-23 1983-04-28 富士通株式会社 spin coater
JPS58144830U (en) * 1982-03-24 1983-09-29 富士通株式会社 spin coater
JPS63134076A (en) * 1986-11-25 1988-06-06 Toshiba Corp Method and device for coating
US4790262A (en) * 1985-10-07 1988-12-13 Tokyo Denshi Kagaku Co., Ltd. Thin-film coating apparatus
JPH01156776U (en) * 1988-04-20 1989-10-27
US5095848A (en) * 1989-05-02 1992-03-17 Mitsubishi Denki Kabushiki Kaisha Spin coating apparatus using a tilting chuck
US5264246A (en) * 1989-05-02 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Spin coating method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174240A (en) * 1974-12-24 1976-06-28 Tokyo Shibaura Electric Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5174240A (en) * 1974-12-24 1976-06-28 Tokyo Shibaura Electric Co

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57135067A (en) * 1981-02-16 1982-08-20 Tokyo Denshi Kagaku Kabushiki Thin film-applying machine
US4528934A (en) * 1981-02-16 1985-07-16 Tokyo Denshi Kagaku Kabushiki Kaisha Thin-film coating apparatus
JPS6341630B2 (en) * 1981-02-16 1988-08-18 Tokyo Ohka Kogyo Co Ltd
JPS5863744U (en) * 1981-10-23 1983-04-28 富士通株式会社 spin coater
JPS58144830U (en) * 1982-03-24 1983-09-29 富士通株式会社 spin coater
US4790262A (en) * 1985-10-07 1988-12-13 Tokyo Denshi Kagaku Co., Ltd. Thin-film coating apparatus
JPS63134076A (en) * 1986-11-25 1988-06-06 Toshiba Corp Method and device for coating
JPH01156776U (en) * 1988-04-20 1989-10-27
US5095848A (en) * 1989-05-02 1992-03-17 Mitsubishi Denki Kabushiki Kaisha Spin coating apparatus using a tilting chuck
US5264246A (en) * 1989-05-02 1993-11-23 Mitsubishi Denki Kabushiki Kaisha Spin coating method

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