JPH01156776U - - Google Patents
Info
- Publication number
- JPH01156776U JPH01156776U JP5221388U JP5221388U JPH01156776U JP H01156776 U JPH01156776 U JP H01156776U JP 5221388 U JP5221388 U JP 5221388U JP 5221388 U JP5221388 U JP 5221388U JP H01156776 U JPH01156776 U JP H01156776U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- container
- spin coating
- wall
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004528 spin coating Methods 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 4
- 238000000576 coating method Methods 0.000 claims 4
- 239000002657 fibrous material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案による回転塗布装置の一実施例
の概略断面図、第２図は上記実施例の容器壁部の
拡大断面図、第３図及び第４図は互いに異なる他
の実施例の容器壁部の拡大断面図である。
１……回転台、２……被塗布物体、３……供給
ノズル、４……背面洗浄ノズル、５……容器、５
ａ……注入口、５ｂ……内壁部、５ｃ……外壁部
、５ｄ……吐出口、６……廃液管、７……ヒータ
。
FIG. 1 is a schematic sectional view of one embodiment of the spin coating device according to the present invention, FIG. 2 is an enlarged sectional view of the container wall of the above embodiment, and FIGS. 3 and 4 are of other embodiments different from each other. FIG. 3 is an enlarged cross-sectional view of the container wall. 1... Turntable, 2... Object to be coated, 3... Supply nozzle, 4... Back cleaning nozzle, 5... Container, 5
a... Inlet, 5b... Inner wall, 5c... Outer wall, 5d... Outlet, 6... Waste liquid pipe, 7... Heater.
Claims (1)
心部上に塗布材料を滴下せしめることにより塗布
を行う回転塗布装置において、回転塗布部の周り
を囲む容器の壁体の少なくとも一部を多孔質化し
、その多孔質部分を介して前記壁体の内面に洗浄
液を常時滲み出させるようにしたことを特徴とす
る回転塗布装置。 (2) 容器外部から加熱することにより容器内部
の蒸気圧を適正に制御するようにしたことを特徴
とする請求項(1)に記載の回転塗布装置。 (3) 間欠的に容器の上端から洗浄液をオーバー
フローさせて前記壁体の内面上を流れ落ちるよう
にしたことを特徴とする請求項(1)又は(2)に記載
の回転塗布装置。 (4) 多孔質材料又は繊維質材料を用いることに
より前記多孔質部分を形成するようにしたことを
特徴とする請求項(1)乃至(3)の何れかに記載の回
転塗布装置。 (5) 容器の壁体をレーザー加工することにより
多孔質部分を形成するようにしたことを特徴とす
る請求項(1)乃至(3)の何れかに記載の回転塗布装
置。[Scope of Claim for Utility Model Registration] (1) A container surrounding a rotary coating section in a rotary coating device that performs coating by dripping a coating material onto the center of a disk-shaped object while rotating it. A spin coating device characterized in that at least a part of the wall is made porous so that a cleaning liquid constantly seeps out onto the inner surface of the wall through the porous portion. (2) The spin coating device according to claim (1), wherein the vapor pressure inside the container is properly controlled by heating from outside the container. (3) The spin coating device according to claim 1 or 2, wherein the cleaning liquid is made to intermittently overflow from the upper end of the container and flow down on the inner surface of the wall. (4) The spin coating device according to any one of claims (1) to (3), wherein the porous portion is formed by using a porous material or a fibrous material. (5) The spin coating device according to any one of claims (1) to (3), wherein the porous portion is formed by laser processing the wall of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5221388U JPH01156776U (en) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5221388U JPH01156776U (en) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156776U true JPH01156776U (en) | 1989-10-27 |
Family
ID=31278220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5221388U Pending JPH01156776U (en) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156776U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010109118A (en) * | 2008-10-30 | 2010-05-13 | Shibaura Mechatronics Corp | Substrate processing apparatus and substrate processing method |
| JP2014027201A (en) * | 2012-07-30 | 2014-02-06 | Dainippon Screen Mfg Co Ltd | Substrate processing device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5372464A (en) * | 1976-12-08 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Method and apparatus for rotary coating |
| JPS5652745A (en) * | 1979-10-05 | 1981-05-12 | Matsushita Electric Ind Co Ltd | Method and apparatus for applying photosensitive resin |
| JPS5745237A (en) * | 1980-09-01 | 1982-03-15 | Fujitsu Ltd | Rotary processing device |
-
1988
- 1988-04-20 JP JP5221388U patent/JPH01156776U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5372464A (en) * | 1976-12-08 | 1978-06-27 | Matsushita Electric Ind Co Ltd | Method and apparatus for rotary coating |
| JPS5652745A (en) * | 1979-10-05 | 1981-05-12 | Matsushita Electric Ind Co Ltd | Method and apparatus for applying photosensitive resin |
| JPS5745237A (en) * | 1980-09-01 | 1982-03-15 | Fujitsu Ltd | Rotary processing device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010109118A (en) * | 2008-10-30 | 2010-05-13 | Shibaura Mechatronics Corp | Substrate processing apparatus and substrate processing method |
| JP2014027201A (en) * | 2012-07-30 | 2014-02-06 | Dainippon Screen Mfg Co Ltd | Substrate processing device |