JPS5982577U - Rotary coating device - Google Patents
Rotary coating deviceInfo
- Publication number
- JPS5982577U JPS5982577U JP17892182U JP17892182U JPS5982577U JP S5982577 U JPS5982577 U JP S5982577U JP 17892182 U JP17892182 U JP 17892182U JP 17892182 U JP17892182 U JP 17892182U JP S5982577 U JPS5982577 U JP S5982577U
- Authority
- JP
- Japan
- Prior art keywords
- coating device
- coated
- rotary coating
- container
- wall surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案による塗布装置の一実施例の概略断面図
、第２図は第１図のＡ部分の拡大断面図である。
１・・・カップ、２・・・回転軸、３・・・排出口、４
・・・レジスト滴下用ノズル、５・・・洗浄液供給管、
６・・・洗浄液ノズル。FIG. 1 is a schematic sectional view of an embodiment of a coating device according to the present invention, and FIG. 2 is an enlarged sectional view of portion A in FIG. 1. 1... Cup, 2... Rotating shaft, 3... Discharge port, 4
...Resist dripping nozzle, 5...Cleaning liquid supply pipe,
6...Cleaning liquid nozzle.
Claims (1)
で回転させ、回転する遠心力を利用して被塗布体表面全
体に拡散塗布する回転式塗布装置において、前記容器の
内壁面に沿って洗浄液を供給−し、容器内壁面に付着し
た塗布液を洗い流す容器内壁面洗浄装置を具備させたこ
とを特徴とする回転式塗布装置。In a rotary coating device that drops a coating liquid onto the surface of an object to be coated, rotates the object to be coated within a container, and uses the rotating centrifugal force to spread the coating over the entire surface of the object to be coated. A rotary coating device characterized in that it is equipped with a container inner wall surface cleaning device that supplies a cleaning solution along the wall surface and washes away the coating solution adhering to the inner wall surface of the container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17892182U JPS5982577U (en) | 1982-11-29 | 1982-11-29 | Rotary coating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17892182U JPS5982577U (en) | 1982-11-29 | 1982-11-29 | Rotary coating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5982577U true JPS5982577U (en) | 1984-06-04 |
Family
ID=30388326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17892182U Pending JPS5982577U (en) | 1982-11-29 | 1982-11-29 | Rotary coating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5982577U (en) |
-
1982
- 1982-11-29 JP JP17892182U patent/JPS5982577U/en active Pending
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