JPH045274U - - Google Patents
Info
- Publication number
- JPH045274U JPH045274U JP4562990U JP4562990U JPH045274U JP H045274 U JPH045274 U JP H045274U JP 4562990 U JP4562990 U JP 4562990U JP 4562990 U JP4562990 U JP 4562990U JP H045274 U JPH045274 U JP H045274U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning liquid
- cover
- liquid supply
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第1図は一実施例の縦断面説明図、第2図はそ
の上から見た説明図、第3図は使用状態の説明図
、第4図は他の一例を示す説明図、第5図は回転
塗布装置の説明図である。
1……アーム部材、11……雌螺子、12……
アーム部、13……洗浄液供給口、14……中空
部、15……洗浄液吐出口、16……フツク、1
7……蝶番、18……レジスト供給ノズル、2…
…洗浄部材、3……スピンヘツド、4……回転軸
、5……上カバー、6……下カバー、7……洗浄
液、8……洗浄液供給ノズル。
Fig. 1 is an explanatory longitudinal cross-sectional view of one embodiment, Fig. 2 is an explanatory view seen from above, Fig. 3 is an explanatory view of the usage state, Fig. 4 is an explanatory view showing another example, Fig. 5 FIG. 2 is an explanatory diagram of a rotary coating device. 1...Arm member, 11...Female screw, 12...
Arm part, 13...Cleaning liquid supply port, 14...Hollow part, 15...Cleaning liquid discharge port, 16...Hook, 1
7... Hinge, 18... Resist supply nozzle, 2...
...Cleaning member, 3...Spin head, 4...Rotating shaft, 5...Upper cover, 6...Lower cover, 7...Cleaning liquid, 8...Cleaning liquid supply nozzle.
Claims (1)
と、該アーム部材外表面に備える洗浄部材とから
構成され、アーム部材はスピンヘツドの周囲に配
置されたカバー内に進入可能な形状を有すると共
に、回転中心部材に洗浄液供給口と、前記カバー
内面に対峙する部分に前記洗浄液供給口と連通す
る洗浄液吐出口とを有し、前記洗浄部材は前記カ
バー内面に接触可能であることを特徴とする回転
塗布装置のカバー内面洗浄治具。 It is composed of an arm member that can be attached to the rotating shaft of the spin head, and a cleaning member provided on the outer surface of the arm member. A rotary coating device having a cleaning liquid supply port in a member, and a cleaning liquid discharge port communicating with the cleaning liquid supply port in a portion facing the inner surface of the cover, the cleaning member being able to come into contact with the inner surface of the cover. Cleaning jig for the inner surface of the cover.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4562990U JPH045274U (en) | 1990-04-27 | 1990-04-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4562990U JPH045274U (en) | 1990-04-27 | 1990-04-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH045274U true JPH045274U (en) | 1992-01-17 |
Family
ID=31559982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4562990U Pending JPH045274U (en) | 1990-04-27 | 1990-04-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH045274U (en) |
-
1990
- 1990-04-27 JP JP4562990U patent/JPH045274U/ja active Pending