JPH01120980U - - Google Patents
Info
- Publication number
- JPH01120980U JPH01120980U JP1655388U JP1655388U JPH01120980U JP H01120980 U JPH01120980 U JP H01120980U JP 1655388 U JP1655388 U JP 1655388U JP 1655388 U JP1655388 U JP 1655388U JP H01120980 U JPH01120980 U JP H01120980U
- Authority
- JP
- Japan
- Prior art keywords
- coated
- rotating
- material onto
- coating material
- coating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 4
- 238000000576 coating method Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第1図は本考案の一実施例であるスピンコータ
の要部を示す概略的部分縦断端面図、第2図は本
考案の他の実施例であるスピンコータの要部を示
す概略的部分縦断端面図、第3図は本考案の更に
他の実施例であるスピンコータの要部を示す概略
的部分縦断端面図、第4図は従来のスピンコータ
の一例の要部を示す概略的部分縦断面図、第5図
は第4図例の部分縦断端面図である。
1……半導体ウエハ、2……スピンチヤツク、
3……スピンカツプ(コータカツプ)、4……フ
オトレジスト供給管、5……ノズル、6……フオ
トレジスト飛沫、7……フオトレジスト洗浄液飛
沫、8……遮蔽板、9……溝、10……排出管、
X……排気流、Y……空気乱流。
FIG. 1 is a schematic partial vertical cross-sectional end view showing the main parts of a spin coater that is an embodiment of the present invention, and FIG. 2 is a schematic partial longitudinal cross-sectional end view showing the main parts of a spin coater that is another embodiment of the present invention. , FIG. 3 is a schematic partial longitudinal cross-sectional end view showing the main parts of a spin coater which is still another embodiment of the present invention, FIG. 4 is a schematic partial longitudinal cross-sectional view showing the main parts of an example of a conventional spin coater, and FIG. FIG. 5 is a partial longitudinal sectional end view of the example shown in FIG. 1... Semiconductor wafer, 2... Spin chuck,
3... Spin cup (coater cup), 4... Photoresist supply pipe, 5... Nozzle, 6... Photoresist splash, 7... Photoresist cleaning liquid splash, 8... Shielding plate, 9... Groove, 10... discharge pipe,
X...exhaust flow, Y...air turbulence.
Claims (1)
、該支持体に支持された上記被塗布体を囲む円筒
状容器とを具備し、上記被塗布体の表面に塗布材
を滴下すると共に上記被塗布体を回転させて上記
被塗布体の表面に上記塗布材を塗布するように成
された回転塗布装置において、 上記被塗布体の外側上方に環状の遮蔽板を設け
たことを特徴とする回転塗布装置。[Claims for Utility Model Registration] A support body for horizontally supporting and rotating an object to be coated, and a cylindrical container surrounding the object to be coated supported by the support, the surface of the object to be coated being In the rotary coating device configured to apply the coating material onto the surface of the object to be coated by dropping the coating material onto the surface of the object to be coated and rotating the object to be coated, an annular shielding plate is provided above the outer side of the object to be coated. A rotary coating device characterized by being provided with.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1655388U JPH01120980U (en) | 1988-02-10 | 1988-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1655388U JPH01120980U (en) | 1988-02-10 | 1988-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01120980U true JPH01120980U (en) | 1989-08-16 |
Family
ID=31229585
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1655388U Pending JPH01120980U (en) | 1988-02-10 | 1988-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01120980U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0392800U (en) * | 1990-01-11 | 1991-09-20 |
-
1988
- 1988-02-10 JP JP1655388U patent/JPH01120980U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0392800U (en) * | 1990-01-11 | 1991-09-20 |
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