JPS63193573U - - Google Patents
Info
- Publication number
- JPS63193573U JPS63193573U JP8314487U JP8314487U JPS63193573U JP S63193573 U JPS63193573 U JP S63193573U JP 8314487 U JP8314487 U JP 8314487U JP 8314487 U JP8314487 U JP 8314487U JP S63193573 U JPS63193573 U JP S63193573U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- degrees
- angle
- liquid substance
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案にかかる回転塗布装置の液状物
質充填容器の設置縦断面図、第２図は従来の回転
塗布装置の液状物質充填容器の設置縦断面図であ
る。
１…容器、２…供給管、３…液状物質、４…容
器ガイド、５…供給管固定具、６…容器接続フタ
。
FIG. 1 is a longitudinal cross-sectional view of a liquid substance filling container of a spin coating apparatus according to the present invention, and FIG. 2 is a longitudinal cross-sectional view of a liquid substance filling container of a conventional spin coating apparatus. DESCRIPTION OF SYMBOLS 1... Container, 2... Supply pipe, 3... Liquid substance, 4... Container guide, 5... Supply pipe fixture, 6... Container connection lid.
Claims (1)
させ、基板表面にフイルム状物質を均一に形成す
る装置において、前記液状物質を供給する容器を
垂直軸に対して３０度ないし６０度の範囲で傾斜
させて設置することを特徴とする半導体製造装置
。 In an apparatus that drops a liquid substance onto the surface of a substrate and rotates the substrate to uniformly form a film-like substance on the substrate surface, the container for supplying the liquid substance is set at an angle of 30 degrees to 60 degrees with respect to a vertical axis. Semiconductor manufacturing equipment characterized by being installed at an angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8314487U JPS63193573U (en) | 1987-05-29 | 1987-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8314487U JPS63193573U (en) | 1987-05-29 | 1987-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193573U true JPS63193573U (en) | 1988-12-13 |
Family
ID=30936465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8314487U Pending JPS63193573U (en) | 1987-05-29 | 1987-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193573U (en) |
-
1987
- 1987-05-29 JP JP8314487U patent/JPS63193573U/ja active Pending
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