JPH0290846U - - Google Patents
Info
- Publication number
- JPH0290846U JPH0290846U JP17021088U JP17021088U JPH0290846U JP H0290846 U JPH0290846 U JP H0290846U JP 17021088 U JP17021088 U JP 17021088U JP 17021088 U JP17021088 U JP 17021088U JP H0290846 U JPH0290846 U JP H0290846U
- Authority
- JP
- Japan
- Prior art keywords
- cup
- vacuum chuck
- cleaning
- mountain
- dip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 1
Description
第１図は従来装置を示すものでＡは斜視図、Ｂ
は同Ｘ−Ｘ線断面図、第２図はその洗浄作用説明
図、第３図は本考案装置の部分断面図、第４図は
その作用説明図である。
１……カツプ、２……内底面、３……薬液供給
口、４……現像用薬液、５……被現像物、６……
廃液バルブ、９……バキユームチヤツク、１０…
…スピンドルチヤツク、１１……洗浄液導管。
Figure 1 shows a conventional device, where A is a perspective view and B is a perspective view.
2 is a sectional view taken along the line X--X, FIG. 2 is a diagram illustrating its cleaning action, FIG. 3 is a partial sectional view of the device of the present invention, and FIG. 4 is a diagram illustrating its action. 1... Cup, 2... Inner bottom surface, 3... Chemical solution supply port, 4... Chemical solution for development, 5... Object to be developed, 6...
Waste liquid valve, 9...Vacuum chuck, 10...
...Spindle chuck, 11...Cleaning liquid conduit.
Claims (1)
体に被現像物を吸着保持するバキユームチヤツク
を取付けしめたデイツプ現像用装置に於いて、バ
キユームチヤツクの導管途中に洗浄液導管を連結
してバキユームチヤツクを洗浄ノズルに兼用可能
となさしめると共に、該位置からカツプ内定面に
向う下降傾斜角θが比較的小となるように構成し
たことを特徴とするデイツプ現像用装置のカツプ
内面洗浄装置。 In a dip developing device in which a mountain-like body is formed near the center of the cup and a vacuum chuck is attached to the mountain-like body to adsorb and hold the object to be developed, a cleaning liquid is placed in the middle of the conduit of the vacuum chuck. For dip development, characterized in that the vacuum chuck can be used also as a cleaning nozzle by connecting conduits, and the downward inclination angle θ from the position toward the inner surface of the cup is relatively small. Equipment for cleaning the inside of the cup.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (en) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (en) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290846U true JPH0290846U (en) | 1990-07-18 |
| JPH0425706Y2 JPH0425706Y2 (en) | 1992-06-19 |
Family
ID=31460958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17021088U Expired JPH0425706Y2 (en) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425706Y2 (en) |
-
1988
- 1988-12-30 JP JP17021088U patent/JPH0425706Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425706Y2 (en) | 1992-06-19 |