JPS525269A - Rotary coating device - Google Patents

Rotary coating device

Info

Publication number
JPS525269A
JPS525269A JP8088975A JP8088975A JPS525269A JP S525269 A JPS525269 A JP S525269A JP 8088975 A JP8088975 A JP 8088975A JP 8088975 A JP8088975 A JP 8088975A JP S525269 A JPS525269 A JP S525269A
Authority
JP
Japan
Prior art keywords
coating device
rotary coating
rotary
coating
adhering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8088975A
Other languages
Japanese (ja)
Other versions
JPS5337702B2 (en
Inventor
Tamotsu Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8088975A priority Critical patent/JPS525269A/en
Publication of JPS525269A publication Critical patent/JPS525269A/en
Publication of JPS5337702B2 publication Critical patent/JPS5337702B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: Rotary coating device preventing coating solution particle from adhering on coating film surface.
COPYRIGHT: (C)1977,JPO&Japio
JP8088975A 1975-07-02 1975-07-02 Rotary coating device Granted JPS525269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8088975A JPS525269A (en) 1975-07-02 1975-07-02 Rotary coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8088975A JPS525269A (en) 1975-07-02 1975-07-02 Rotary coating device

Publications (2)

Publication Number Publication Date
JPS525269A true JPS525269A (en) 1977-01-14
JPS5337702B2 JPS5337702B2 (en) 1978-10-11

Family

ID=13730907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8088975A Granted JPS525269A (en) 1975-07-02 1975-07-02 Rotary coating device

Country Status (1)

Country Link
JP (1) JPS525269A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4393807A (en) * 1979-09-19 1983-07-19 Fujitsu Limited Spinner
JPH0390430U (en) * 1989-12-28 1991-09-13

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4393807A (en) * 1979-09-19 1983-07-19 Fujitsu Limited Spinner
JPH0390430U (en) * 1989-12-28 1991-09-13

Also Published As

Publication number Publication date
JPS5337702B2 (en) 1978-10-11

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