JPS51140573A - Photo-resist coating device - Google Patents
Photo-resist coating deviceInfo
- Publication number
- JPS51140573A JPS51140573A JP6430775A JP6430775A JPS51140573A JP S51140573 A JPS51140573 A JP S51140573A JP 6430775 A JP6430775 A JP 6430775A JP 6430775 A JP6430775 A JP 6430775A JP S51140573 A JPS51140573 A JP S51140573A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- coating device
- resist coating
- resist
- effecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide a photo-resist coating device having a structure capable of effecting an uniform coat of photo-resist to the objective surface.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6430775A JPS51140573A (en) | 1975-05-30 | 1975-05-30 | Photo-resist coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6430775A JPS51140573A (en) | 1975-05-30 | 1975-05-30 | Photo-resist coating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140573A true JPS51140573A (en) | 1976-12-03 |
Family
ID=13254443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6430775A Pending JPS51140573A (en) | 1975-05-30 | 1975-05-30 | Photo-resist coating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140573A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
-
1975
- 1975-05-30 JP JP6430775A patent/JPS51140573A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5769737A (en) * | 1980-10-17 | 1982-04-28 | Hitachi Ltd | Coating method and device for resist on both side surfaces of wafer |
JPS6226579B2 (en) * | 1980-10-17 | 1987-06-09 | Hitachi Ltd |
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