JPS52151560A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52151560A JPS52151560A JP6900876A JP6900876A JPS52151560A JP S52151560 A JPS52151560 A JP S52151560A JP 6900876 A JP6900876 A JP 6900876A JP 6900876 A JP6900876 A JP 6900876A JP S52151560 A JPS52151560 A JP S52151560A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- removal
- deposition
- prevention
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: Easy removal of a protecting film without using any special solvent, reduction in costs required for the removal and prevention of deposition of silicone dust on electrodes are made possible.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6900876A JPS52151560A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6900876A JPS52151560A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52151560A true JPS52151560A (en) | 1977-12-16 |
Family
ID=13390128
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6900876A Pending JPS52151560A (en) | 1976-06-11 | 1976-06-11 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52151560A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0681774U (en) * | 1993-04-28 | 1994-11-22 | 荘八 松下 | Magnet bar |
JP2002088297A (en) * | 2000-09-11 | 2002-03-27 | Showa Denko Kk | Surface protective material |
US6805808B2 (en) | 2000-09-14 | 2004-10-19 | Sumitomo Electric Industries, Ltd. | Method for separating chips from diamond wafer |
JP2006339702A (en) * | 2005-05-31 | 2006-12-14 | Kyocera Kinseki Corp | Manufacturing method of piezoelectric device |
JP5454780B2 (en) * | 2008-02-15 | 2014-03-26 | 日産化学工業株式会社 | Coating composition for semiconductor element protective film |
JP2014523109A (en) * | 2011-06-15 | 2014-09-08 | アプライド マテリアルズ インコーポレイテッド | Multilayer mask for laser substrate dicing and plasma etching |
-
1976
- 1976-06-11 JP JP6900876A patent/JPS52151560A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0681774U (en) * | 1993-04-28 | 1994-11-22 | 荘八 松下 | Magnet bar |
JP2002088297A (en) * | 2000-09-11 | 2002-03-27 | Showa Denko Kk | Surface protective material |
US6805808B2 (en) | 2000-09-14 | 2004-10-19 | Sumitomo Electric Industries, Ltd. | Method for separating chips from diamond wafer |
JP2006339702A (en) * | 2005-05-31 | 2006-12-14 | Kyocera Kinseki Corp | Manufacturing method of piezoelectric device |
JP5454780B2 (en) * | 2008-02-15 | 2014-03-26 | 日産化学工業株式会社 | Coating composition for semiconductor element protective film |
JP2014523109A (en) * | 2011-06-15 | 2014-09-08 | アプライド マテリアルズ インコーポレイテッド | Multilayer mask for laser substrate dicing and plasma etching |
JP2015097278A (en) * | 2011-06-15 | 2015-05-21 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Multilayer mask for substrate dicing and plasma etching using laser |
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