JPS52150973A - Vaporing substrate and filtering mask for semiconductor and the like - Google Patents

Vaporing substrate and filtering mask for semiconductor and the like

Info

Publication number
JPS52150973A
JPS52150973A JP6715376A JP6715376A JPS52150973A JP S52150973 A JPS52150973 A JP S52150973A JP 6715376 A JP6715376 A JP 6715376A JP 6715376 A JP6715376 A JP 6715376A JP S52150973 A JPS52150973 A JP S52150973A
Authority
JP
Japan
Prior art keywords
vaporing
semiconductor
substrate
filtering mask
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6715376A
Other languages
Japanese (ja)
Inventor
Kouhei Matsuyama
Tadashi Negishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ichikoh Industries Ltd
Original Assignee
Ichikoh Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ichikoh Industries Ltd filed Critical Ichikoh Industries Ltd
Priority to JP6715376A priority Critical patent/JPS52150973A/en
Publication of JPS52150973A publication Critical patent/JPS52150973A/en
Pending legal-status Critical Current

Links

JP6715376A 1976-06-10 1976-06-10 Vaporing substrate and filtering mask for semiconductor and the like Pending JPS52150973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6715376A JPS52150973A (en) 1976-06-10 1976-06-10 Vaporing substrate and filtering mask for semiconductor and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6715376A JPS52150973A (en) 1976-06-10 1976-06-10 Vaporing substrate and filtering mask for semiconductor and the like

Publications (1)

Publication Number Publication Date
JPS52150973A true JPS52150973A (en) 1977-12-15

Family

ID=13336665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6715376A Pending JPS52150973A (en) 1976-06-10 1976-06-10 Vaporing substrate and filtering mask for semiconductor and the like

Country Status (1)

Country Link
JP (1) JPS52150973A (en)

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