JPS52150973A - Vaporing substrate and filtering mask for semiconductor and the like - Google Patents
Vaporing substrate and filtering mask for semiconductor and the likeInfo
- Publication number
- JPS52150973A JPS52150973A JP6715376A JP6715376A JPS52150973A JP S52150973 A JPS52150973 A JP S52150973A JP 6715376 A JP6715376 A JP 6715376A JP 6715376 A JP6715376 A JP 6715376A JP S52150973 A JPS52150973 A JP S52150973A
- Authority
- JP
- Japan
- Prior art keywords
- vaporing
- semiconductor
- substrate
- filtering mask
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6715376A JPS52150973A (en) | 1976-06-10 | 1976-06-10 | Vaporing substrate and filtering mask for semiconductor and the like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6715376A JPS52150973A (en) | 1976-06-10 | 1976-06-10 | Vaporing substrate and filtering mask for semiconductor and the like |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52150973A true JPS52150973A (en) | 1977-12-15 |
Family
ID=13336665
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6715376A Pending JPS52150973A (en) | 1976-06-10 | 1976-06-10 | Vaporing substrate and filtering mask for semiconductor and the like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52150973A (en) |
-
1976
- 1976-06-10 JP JP6715376A patent/JPS52150973A/en active Pending
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