JPS583970U - Resist coating equipment - Google Patents
Resist coating equipmentInfo
- Publication number
- JPS583970U JPS583970U JP9414681U JP9414681U JPS583970U JP S583970 U JPS583970 U JP S583970U JP 9414681 U JP9414681 U JP 9414681U JP 9414681 U JP9414681 U JP 9414681U JP S583970 U JPS583970 U JP S583970U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- substrate
- mounting table
- onto
- resist coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案しピスト塗布装置の斜視図、第２図は
本考案装置で基板上にレジストを滴下したと柔ろを示す
状態図である。
１・・・中央ノズル、２・・・中央ノズルアーム、３・
・・周辺ノズル、５・・・モータ、６． ６． ６・・
・チューブ。FIG. 1 is a perspective view of the piston coating device of the present invention, and FIG. 2 is a state diagram showing how the resist is applied onto a substrate by the device of the present invention. 1... Central nozzle, 2... Central nozzle arm, 3...
... Peripheral nozzle, 5... Motor, 6. 6. 6...
·tube.
Claims (1)
置台と、レジストを載置台上の基板の中央部に滴下する
中央ノズルと、基板の周辺部にレジストを滴下する周辺
ノズルと、から成り、レジスト塗布時に、基板の中心部
と周辺部とに夫々レジストを滴下させると共に基板を載
置台と一緒に回転させて各ノズルから滴下されたレジス
トを基板表面に広げ、均一な膜厚のレジスト膜を形成す
る事を特徴としたレジスト塗布装置。(1) Consisting of a rotating mounting table on which a substrate to be coated with resist is placed, a central nozzle that drips resist onto the center of the substrate on the mounting table, and a peripheral nozzle that drips resist onto the periphery of the substrate. During resist application, resist is dripped onto the center and periphery of the substrate, and the substrate is rotated together with the mounting table to spread the resist dripped from each nozzle over the substrate surface, creating a resist film with a uniform thickness. A resist coating device characterized by forming.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9414681U JPS583970U (en) | 1981-06-24 | 1981-06-24 | Resist coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9414681U JPS583970U (en) | 1981-06-24 | 1981-06-24 | Resist coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS583970U true JPS583970U (en) | 1983-01-11 |
Family
ID=29889083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9414681U Pending JPS583970U (en) | 1981-06-24 | 1981-06-24 | Resist coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS583970U (en) |
-
1981
- 1981-06-24 JP JP9414681U patent/JPS583970U/en active Pending
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