JPS60158773U - Film forming equipment - Google Patents

Film forming equipment

Info

Publication number
JPS60158773U
JPS60158773U JP4733584U JP4733584U JPS60158773U JP S60158773 U JPS60158773 U JP S60158773U JP 4733584 U JP4733584 U JP 4733584U JP 4733584 U JP4733584 U JP 4733584U JP S60158773 U JPS60158773 U JP S60158773U
Authority
JP
Japan
Prior art keywords
film forming
forming equipment
resin layer
substrate
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4733584U
Other languages
Japanese (ja)
Inventor
豊 巽
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP4733584U priority Critical patent/JPS60158773U/en
Publication of JPS60158773U publication Critical patent/JPS60158773U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の実施例による成膜装置の断面図、第
２図は一部の斜視図、第３図はマスクの断面図、第４図
はマスキング状態の拡大断面図である。 ６・・・マスク、訃・・マスク基体、９・・・樹脂層。FIG. 1 is a sectional view of a film forming apparatus according to an embodiment of the invention, FIG. 2 is a partial perspective view, FIG. 3 is a sectional view of a mask, and FIG. 4 is an enlarged sectional view of a masked state. 6...Mask, butt...Mask base, 9...Resin layer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] マスク基体の表面に、基板上の既設のパターンより柔軟
性であって、熱的に安定な樹脂層を設けたマスクを、前
記基板上に、前記既設のパターンに前記樹脂層が向かい
合うように配置してマスキングしてなる成膜装置。A mask having a resin layer on the surface of a mask base that is more flexible and thermally stable than the existing pattern on the substrate is placed on the substrate so that the resin layer faces the existing pattern. A film forming device that performs masking.
JP4733584U 1984-03-31 1984-03-31 Film forming equipment Pending JPS60158773U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4733584U JPS60158773U (en) 1984-03-31 1984-03-31 Film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4733584U JPS60158773U (en) 1984-03-31 1984-03-31 Film forming equipment

Publications (1)

Publication Number Publication Date
JPS60158773U true JPS60158773U (en) 1985-10-22

Family

ID=30562563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4733584U Pending JPS60158773U (en) 1984-03-31 1984-03-31 Film forming equipment

Country Status (1)

Country Link
JP (1) JPS60158773U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562799A (en) * 1979-06-22 1981-01-13 Daiwa Shinku Kogyosho:Kk Electroacoustic transducer using crystal vibrator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562799A (en) * 1979-06-22 1981-01-13 Daiwa Shinku Kogyosho:Kk Electroacoustic transducer using crystal vibrator

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