JPS6112653U - Bakyu whip - Google Patents
Bakyu whipInfo
- Publication number
- JPS6112653U JPS6112653U JP9467384U JP9467384U JPS6112653U JP S6112653 U JPS6112653 U JP S6112653U JP 9467384 U JP9467384 U JP 9467384U JP 9467384 U JP9467384 U JP 9467384U JP S6112653 U JPS6112653 U JP S6112653U
- Authority
- JP
- Japan
- Prior art keywords
- bakyu
- whip
- vacuum chuck
- substrate
- placing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図Ａは従来のバキュームチャックを用いたレジスト
塗布装置の断面図であり、第１図Ｂは第１図Ａの上面図
である。
第２図は本考案の実施例の断面図である。
尚図において、１・・・・・・モータ、２・・・・・・
モータスピンドル、３・・・・・・バキューム面、４・
・・・・・バキュームチャック軸、５・・・・・・メタ
ルマススク基板、６・・・・・・バキュームバルブ、７
・・曲レジストノズル、８・・・・・・カップ、９・・
・・・・エアー吹き出し口、１０・・・・・・エアー。FIG. 1A is a sectional view of a conventional resist coating apparatus using a vacuum chuck, and FIG. 1B is a top view of FIG. 1A. FIG. 2 is a sectional view of an embodiment of the present invention. In the figure, 1...motor, 2...
Motor spindle, 3... Vacuum surface, 4.
...Vacuum chuck shaft, 5...Metal mask board, 6...Vacuum valve, 7
...Track registration nozzle, 8...Cup, 9...
...Air outlet, 10...Air.
Claims (1)
該基板の裏面にエアーを吹きつける機能が設けられてい
ることを特徴とするバキュームチャック。A vacuum chuck for placing a substrate, characterized in that the vacuum chuck is provided with a function of blowing air onto the back surface of the substrate during rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9467384U JPS6112653U (en) | 1984-06-25 | 1984-06-25 | Bakyu whip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9467384U JPS6112653U (en) | 1984-06-25 | 1984-06-25 | Bakyu whip |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6112653U true JPS6112653U (en) | 1986-01-24 |
Family
ID=30653367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9467384U Pending JPS6112653U (en) | 1984-06-25 | 1984-06-25 | Bakyu whip |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6112653U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268425U (en) * | 1988-11-14 | 1990-05-24 | ||
| JP2023093567A (en) * | 2020-07-07 | 2023-07-04 | ラム リサーチ コーポレーション | Integrated dry processes for patterning radiation photoresist patterning |
| US11921427B2 (en) | 2018-11-14 | 2024-03-05 | Lam Research Corporation | Methods for making hard masks useful in next-generation lithography |
| US11988965B2 (en) | 2020-01-15 | 2024-05-21 | Lam Research Corporation | Underlayer for photoresist adhesion and dose reduction |
-
1984
- 1984-06-25 JP JP9467384U patent/JPS6112653U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0268425U (en) * | 1988-11-14 | 1990-05-24 | ||
| US11921427B2 (en) | 2018-11-14 | 2024-03-05 | Lam Research Corporation | Methods for making hard masks useful in next-generation lithography |
| US11988965B2 (en) | 2020-01-15 | 2024-05-21 | Lam Research Corporation | Underlayer for photoresist adhesion and dose reduction |
| JP2023093567A (en) * | 2020-07-07 | 2023-07-04 | ラム リサーチ コーポレーション | Integrated dry processes for patterning radiation photoresist patterning |
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