JPS583041U - vacuum tweezers - Google Patents
vacuum tweezersInfo
- Publication number
- JPS583041U JPS583041U JP9692081U JP9692081U JPS583041U JP S583041 U JPS583041 U JP S583041U JP 9692081 U JP9692081 U JP 9692081U JP 9692081 U JP9692081 U JP 9692081U JP S583041 U JPS583041 U JP S583041U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum tweezers
- angle
- vacuum
- suction part
- tweezers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000007779 soft material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
、 第１図は従来の真空ピンセットの図。第２図は
′第１図の断面図。第３図は本発明の断面図。第４図は
吸引部と操作部との境界に軟質材を用いた本発明の断面
図。
１、 ３． ５・・・・・・吸引部、２． ４． ６・
・・・・・操作部、Ａ・・・・・・軟質材。 °′, Figure 1 is a diagram of conventional vacuum tweezers. Figure 2 is
'Cross-sectional view of Figure 1. FIG. 3 is a sectional view of the present invention. FIG. 4 is a sectional view of the present invention in which a soft material is used at the boundary between the suction section and the operating section. 1, 3. 5... Suction part, 2. 4. 6.
...Operation unit, A...Soft material. °′
Claims (1)
、吸引する二′とにより他のキャリヤに移し替えを行な
うための真空ピンセットに於いて、該真空ピンセットの
ウェハー吸引部が水平に対して５〜４５°の角度を持た
せであることを特徴とする真空ピンセット。、
、２ 真空ピンセットのウェハー吸引部の角度
は５０〜４５°の範囲で自由自在に変化することが可能
なことを特徴とする特許請求の範囲第１項記載の真空ピ
ンセット。1. In vacuum tweezers for transferring wafers set in a wafer carrier one by one to another carrier by suctioning the wafers one by one, the wafer suction part of the vacuum tweezers is 5 to 45 degrees horizontally. Vacuum tweezers characterized by having an angle of °. ,
, 2. The vacuum tweezers according to claim 1, wherein the angle of the wafer suction part of the vacuum tweezers can be freely changed within a range of 50 to 45 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692081U JPS583041U (en) | 1981-06-29 | 1981-06-29 | vacuum tweezers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9692081U JPS583041U (en) | 1981-06-29 | 1981-06-29 | vacuum tweezers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS583041U true JPS583041U (en) | 1983-01-10 |
Family
ID=29891746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9692081U Pending JPS583041U (en) | 1981-06-29 | 1981-06-29 | vacuum tweezers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS583041U (en) |
-
1981
- 1981-06-29 JP JP9692081U patent/JPS583041U/en active Pending
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