JPS5997868U - vacuum suction tool - Google Patents

vacuum suction tool

Info

Publication number
JPS5997868U
JPS5997868U JP19477182U JP19477182U JPS5997868U JP S5997868 U JPS5997868 U JP S5997868U JP 19477182 U JP19477182 U JP 19477182U JP 19477182 U JP19477182 U JP 19477182U JP S5997868 U JPS5997868 U JP S5997868U
Authority
JP
Japan
Prior art keywords
vacuum suction
suction
suction tool
groove
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19477182U
Other languages
Japanese (ja)
Inventor
志水　孝幸
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP19477182U priority Critical patent/JPS5997868U/en
Publication of JPS5997868U publication Critical patent/JPS5997868U/en
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図ａ、　　ｂおよび第２図ａ、　　ｂはそれぞれ従
　　　−来の真空吸引具を示す正面図および底面図、第
３図ａ、　　ｂはこの考案の一実施例を示す正面図およ
び底面図である。 図中、１は吸着部、１Ｃは真空引き凹溝、２は吸着操作
アーム管、６は可撓自在管、６ａは先端開口、７は保持
リングである。なお、図中の同一７−符号は同一または
相当部分を示す。Figures 1a and 2b are a front view and a bottom view of a conventional vacuum suction device, respectively, and Figures 3a and 3b are a front view and a bottom view of an embodiment of this invention. It is. In the figure, 1 is a suction part, 1C is a vacuum groove, 2 is a suction operation arm tube, 6 is a flexible tube, 6a is a tip opening, and 7 is a retaining ring. Note that the same reference numerals 7- in the drawings indicate the same or corresponding parts.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空引き凹溝をその下面に有する摩擦係数の小さい材料
からなる吸着部と、真空源本体に接続される半導体ウェ
ハの吸着操作アーム管と番、先端開口を前記吸着部の保
持リングを通してその下面凹溝に連通させた可視自在管
で連通状態に一体に結合させたことを特徴とする真空吸
引具。A suction part made of a material with a low coefficient of friction and having a vacuum suction groove on its lower surface, a semiconductor wafer suction operation arm tube connected to the vacuum source main body, and a tip opening passed through the retaining ring of the suction part to the concave part on its lower surface. A vacuum suction tool characterized by a visible flexible tube communicating with a groove and integrally connected in a communicating state.
JP19477182U 1982-12-20 1982-12-20 vacuum suction tool Pending JPS5997868U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19477182U JPS5997868U (en) 1982-12-20 1982-12-20 vacuum suction tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19477182U JPS5997868U (en) 1982-12-20 1982-12-20 vacuum suction tool

Publications (1)

Publication Number Publication Date
JPS5997868U true JPS5997868U (en) 1984-07-03

Family

ID=30418541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19477182U Pending JPS5997868U (en) 1982-12-20 1982-12-20 vacuum suction tool

Country Status (1)

Country Link
JP (1) JPS5997868U (en)

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