JPS59149147U - Spinner coating device - Google Patents

Spinner coating device

Info

Publication number
JPS59149147U
JPS59149147U JP4208883U JP4208883U JPS59149147U JP S59149147 U JPS59149147 U JP S59149147U JP 4208883 U JP4208883 U JP 4208883U JP 4208883 U JP4208883 U JP 4208883U JP S59149147 U JPS59149147 U JP S59149147U
Authority
JP
Japan
Prior art keywords
coating device
holding table
holding
spinner coating
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4208883U
Other languages
Japanese (ja)
Inventor
充 石川
Original Assignee
コニカ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by コニカ株式会社 filed Critical コニカ株式会社
Priority to JP4208883U priority Critical patent/JPS59149147U/en
Publication of JPS59149147U publication Critical patent/JPS59149147U/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図イおよび口はそれぞれ従来のスピンナー塗布装置
の保持台の平面図および縦断正面図、第２図は従来の装
置の他の例を示す保持台の平面図、゛第３図イ〜ハはそ
れぞれ本考案スピンナー塗布装置の一実施例における保
持台の平面図、縦断正面図（Ｉ［Ｉ−ｍ線）および斜視
図、第４図は本考案の他の例を示す保持台の平面図であ
る。 １・・・保持台、１１・・・水平保持面、１２・・・保
持部材、２・・・駆動軸、３・・・排気路、３１・・・
排気口、４・・・排気用溝、■・・・減圧機構、５・・
・０リング、６・・・ストッパー爪、７．７１・・・真
空吸引部、Ｐ・・・基板。Figure 1A and mouth are respectively a plan view and a vertical front view of a holding stand of a conventional spinner coating device, and Figure 2 is a plan view of a holding stand showing another example of the conventional spinner coating device. 4 are a plan view, a vertical sectional front view (line I [I-m)], and a perspective view of a holding stand in one embodiment of the spinner coating device of the present invention, respectively, and FIG. 4 is a plan view of a holding stand showing another example of the present invention. It is. DESCRIPTION OF SYMBOLS 1... Holding stand, 11... Horizontal holding surface, 12... Holding member, 2... Drive shaft, 3... Exhaust path, 31...
Exhaust port, 4... Exhaust groove, ■... Pressure reduction mechanism, 5...
・0 ring, 6... Stopper claw, 7.71... Vacuum suction part, P... Board.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 水平面内で回転可能な、被塗布体を保持する保持台と、
この保持台の上面に設けたリング状の載置杆と、前記保
持台の上面に減圧を作用せしめる減圧機構と、前記載置
杆内の前記保持台の上面に設けたこれより突出する保持
部材とを具えてなることを特徴とする長ピンナー塗布装
置。　′a holding table that holds the object to be coated and is rotatable in a horizontal plane;
A ring-shaped mounting rod provided on the upper surface of the holding table, a pressure reducing mechanism that applies reduced pressure to the upper surface of the holding table, and a holding member protruding from the ring-shaped mounting rod provided on the upper surface of the holding table within the holding rod. A long pinner coating device characterized by comprising: ′
JP4208883U 1983-03-25 1983-03-25 Spinner coating device Pending JPS59149147U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4208883U JPS59149147U (en) 1983-03-25 1983-03-25 Spinner coating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4208883U JPS59149147U (en) 1983-03-25 1983-03-25 Spinner coating device

Publications (1)

Publication Number Publication Date
JPS59149147U true JPS59149147U (en) 1984-10-05

Family

ID=30172648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4208883U Pending JPS59149147U (en) 1983-03-25 1983-03-25 Spinner coating device

Country Status (1)

Country Link
JP (1) JPS59149147U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63248471A (en) * 1987-04-03 1988-10-14 Tokyo Electron Ltd Coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63248471A (en) * 1987-04-03 1988-10-14 Tokyo Electron Ltd Coating device

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