JPH02146837U - - Google Patents
Info
- Publication number
- JPH02146837U JPH02146837U JP5433889U JP5433889U JPH02146837U JP H02146837 U JPH02146837 U JP H02146837U JP 5433889 U JP5433889 U JP 5433889U JP 5433889 U JP5433889 U JP 5433889U JP H02146837 U JPH02146837 U JP H02146837U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- repositioning
- rail
- wafers
- reversing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図はウエハー立え替えレールを三角法によ
り表現した図、第２図はストーツパー、第３図は
ウエハー立て替えレールとストツパーの組み合わ
せの１例、第４図はウエハー立て替えの概念図、
第５図は立て替えレールとストツパーの組み合わ
せの第２例、第６図は第５図の例を使用してウエ
ハー立て替えを行なう概念図である。 １……第
１のウエハーキヤリア、２……ウエハー立て替え
レール、３……（第１の）ストツパー、４……第
２のウエハーキヤリア、５……第２のストツパー
。
Fig. 1 is a trigonometric representation of a wafer repositioning rail, Fig. 2 is a stopper, Fig. 3 is an example of a combination of a wafer repositioning rail and stopper, and Fig. 4 is a conceptual diagram of wafer repositioning.
FIG. 5 is a second example of a combination of a repositioning rail and a stopper, and FIG. 6 is a conceptual diagram of wafer repositioning using the example of FIG. DESCRIPTION OF SYMBOLS 1...First wafer carrier, 2...Wafer repositioning rail, 3...(First) stopper, 4...Second wafer carrier, 5...Second stopper.
Claims (1)
、ウエハーキヤリアの任意位置から任意枚数のウ
エハーを立て替える為の立て替えレールと、それ
と組み合わせるストツパーと、それ等を保持する
為の機構と、ウエハーを任意位置に立て替える為
のキヤリアのスライド機構を有することを特徴と
したウエハー立て替え機。 A wafer reversing machine for semiconductor integrated circuits includes a reversing rail for repositioning any number of wafers from any position on the wafer carrier, a stopper to be combined with the rail, a mechanism for holding them, and a mechanism for repositioning wafers at any position. A wafer reloading machine characterized by having a carrier sliding mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433889U JPH02146837U (en) | 1989-05-10 | 1989-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5433889U JPH02146837U (en) | 1989-05-10 | 1989-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146837U true JPH02146837U (en) | 1990-12-13 |
Family
ID=31576314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5433889U Pending JPH02146837U (en) | 1989-05-10 | 1989-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146837U (en) |
-
1989
- 1989-05-10 JP JP5433889U patent/JPH02146837U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH02146837U (en) | ||
| JPS60130238U (en) | Fine movement and rotation device for wafer transfer | |
| JPS6135748U (en) | Tweezers for semiconductor wafers | |
| JPS63106141U (en) | ||
| JPS60174240U (en) | heat treatment boat | |
| JPS6258041U (en) | ||
| JPS6169824U (en) | ||
| JPS59119449U (en) | Semiconductor device photomask | |
| JPS62190339U (en) | ||
| JPH0193736U (en) | ||
| JPS60169838U (en) | semiconductor manufacturing equipment | |
| JPH03109351U (en) | ||
| JPS63102238U (en) | ||
| JPS6033445U (en) | Pitch conversion wafer advance equipment | |
| JPS6179681U (en) | ||
| JPS6132077U (en) | Tray for transporting semiconductor wafers | |
| JPS6331535U (en) | ||
| JPS61142444U (en) | ||
| JPH0170354U (en) | ||
| JPH03113860U (en) | ||
| JPH0269863U (en) | ||
| JPH0370468U (en) | ||
| JPH0325239U (en) | ||
| JPS6393636U (en) | ||
| JPS6313938U (en) |