JPS62190339U - - Google Patents
Info
- Publication number
- JPS62190339U JPS62190339U JP8058486U JP8058486U JPS62190339U JP S62190339 U JPS62190339 U JP S62190339U JP 8058486 U JP8058486 U JP 8058486U JP 8058486 U JP8058486 U JP 8058486U JP S62190339 U JPS62190339 U JP S62190339U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- main surface
- substrate support
- nozzle
- developing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Description
第１図は本考案による一実施例の側面図、第２
図は従来の現像装置の側面図である。
１：半導体基板、５：支持具、６：ノズル、７
：現像液、８：移動機構。
Figure 1 is a side view of one embodiment of the present invention;
The figure is a side view of a conventional developing device. 1: Semiconductor substrate, 5: Support tool, 6: Nozzle, 7
: developer, 8: movement mechanism.
Claims (1)
る基板支持具と、 上記基板の主面と対向し、且つ基板支持具の下
方に位置する現像液噴射ノズルと、 上記基板主面を掃引するべく、上記ノズルと基
板支持具を相対的に移動させる移動機構とを備え
てなることを特徴とする現像装置。[Claims for Utility Model Registration] A substrate support that holds the back side of a substrate whose main surface is coated with resist; a developer injection nozzle that faces the main surface of the substrate and is located below the substrate support; A developing device comprising: a moving mechanism that relatively moves the nozzle and the substrate support to sweep the main surface of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8058486U JPS62190339U (en) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8058486U JPS62190339U (en) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190339U true JPS62190339U (en) | 1987-12-03 |
Family
ID=30931519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8058486U Pending JPS62190339U (en) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190339U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148825A (en) * | 1989-11-06 | 1991-06-25 | Ebara Corp | Jet scrubber |
-
1986
- 1986-05-26 JP JP8058486U patent/JPS62190339U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148825A (en) * | 1989-11-06 | 1991-06-25 | Ebara Corp | Jet scrubber |
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