JPS6217135U - - Google Patents
Info
- Publication number
- JPS6217135U JPS6217135U JP10760485U JP10760485U JPS6217135U JP S6217135 U JPS6217135 U JP S6217135U JP 10760485 U JP10760485 U JP 10760485U JP 10760485 U JP10760485 U JP 10760485U JP S6217135 U JPS6217135 U JP S6217135U
- Authority
- JP
- Japan
- Prior art keywords
- base materials
- pitch
- increasing
- decreasing
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims 2
- 239000000969 carrier Substances 0.000 claims 1
Description
第１図は本考案の一実施例のピツチ変換装置を
示す斜視図、第２図は自動搬送システムの要部を
示す斜視図、第３図は同じく概略を示す側面図で
ある。
１：自動走行車、２：ウエハキヤリア、３：搭
載アーム、４：レール、５：移載装置、６：移載
アーム、７：ローデイング・アンローデイングシ
ステム、８：投入・取出口、９：ローデイングベ
ース板、１０：開口、１１：スライドシヤフト、
１２：移動ベース板、１３：ガイド材、１４：位
置決めコマ、１５：モータ、１６，１７：クラン
ク軸、１８：円板、１９：センサ。
FIG. 1 is a perspective view showing a pitch converting device according to an embodiment of the present invention, FIG. 2 is a perspective view showing essential parts of an automatic conveyance system, and FIG. 3 is a side view schematically showing the same. 1: Automated vehicle, 2: Wafer carrier, 3: Loading arm, 4: Rail, 5: Transfer device, 6: Transfer arm, 7: Loading/unloading system, 8: Loading/unloading port, 9: Row Ding base plate, 10: opening, 11: slide shaft,
12: Moving base plate, 13: Guide material, 14: Positioning piece, 15: Motor, 16, 17: Crankshaft, 18: Disc, 19: Sensor.
Claims (1)
ハキヤリア２に対応して複数のベース材９，１２
を備えると共に、該複数のベース材９，１２のピ
ツチを増減するピツチ増減機構を該複数のベース
材９，１２間に付設して成ることを特徴とするウ
エハキヤリアのピツチ変換装置。 A plurality of base materials 9, 12 are provided corresponding to a plurality of wafer carriers 2 that are simultaneously transferred from an automatic transfer device.
A pitch changing device for a wafer carrier, characterized in that a pitch increasing/decreasing mechanism for increasing/decreasing the pitch of the plurality of base materials 9, 12 is attached between the plurality of base materials 9, 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10760485U JPS6217135U (en) | 1985-07-16 | 1985-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10760485U JPS6217135U (en) | 1985-07-16 | 1985-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217135U true JPS6217135U (en) | 1987-02-02 |
Family
ID=30984036
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10760485U Pending JPS6217135U (en) | 1985-07-16 | 1985-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217135U (en) |
-
1985
- 1985-07-16 JP JP10760485U patent/JPS6217135U/ja active Pending
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