JPS6296850U - - Google Patents
Info
- Publication number
- JPS6296850U JPS6296850U JP18921985U JP18921985U JPS6296850U JP S6296850 U JPS6296850 U JP S6296850U JP 18921985 U JP18921985 U JP 18921985U JP 18921985 U JP18921985 U JP 18921985U JP S6296850 U JPS6296850 U JP S6296850U
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor
- transport line
- semiconductor elements
- manufacturing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示す概略図、第２
図、第３図は従来例を示す概略図である。
１，２…製造機器、３…供給用マガジンケース
、４…収納用マガジンケース、６…一時保管用マ
ガジンケース。
Fig. 1 is a schematic diagram showing an embodiment of the present invention;
3 are schematic diagrams showing a conventional example. 1, 2...Manufacturing equipment, 3...Magazine case for supply, 4...Magazine case for storage, 6...Magazine case for temporary storage.
Claims (1)
造に必要な複数種の製造機器を有する半導体製造
装置において、製造機器間を結ぶ前記搬送ライン
の途中に、半導体素子を一時的に保管する収納庫
を設けたことを特徴とする半導体製造装置。 In a semiconductor manufacturing apparatus having multiple types of manufacturing equipment necessary for manufacturing semiconductor elements arranged along the same transport line, a storage for temporarily storing the semiconductor elements is provided in the middle of the transport line connecting the manufacturing equipment. A semiconductor manufacturing device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18921985U JPS6296850U (en) | 1985-12-09 | 1985-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18921985U JPS6296850U (en) | 1985-12-09 | 1985-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6296850U true JPS6296850U (en) | 1987-06-20 |
Family
ID=31141312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18921985U Pending JPS6296850U (en) | 1985-12-09 | 1985-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6296850U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253249A (en) * | 1988-03-31 | 1989-10-09 | Tokyo Electron Ltd | Semiconductor manufacturing device |
-
1985
- 1985-12-09 JP JP18921985U patent/JPS6296850U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01253249A (en) * | 1988-03-31 | 1989-10-09 | Tokyo Electron Ltd | Semiconductor manufacturing device |
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