JPS6217136U - - Google Patents
Info
- Publication number
- JPS6217136U JPS6217136U JP10998885U JP10998885U JPS6217136U JP S6217136 U JPS6217136 U JP S6217136U JP 10998885 U JP10998885 U JP 10998885U JP 10998885 U JP10998885 U JP 10998885U JP S6217136 U JPS6217136 U JP S6217136U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- storage jig
- handle
- wafer storage
- storing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 claims 2
Description
第１図、第２図は本考案の半導体ウエハー収納
治具の実施例を示す斜視図。第３図、第４図は、
従来の半導体ウエハー収納治具を示す斜視図。
尚、図において、１……半導体ウエハー収納治
具本体、２ａ，２ｂ，２ｃ……運搬用取手、３ａ
，３ｂ……半導体収納治具側壁、４……半導体ウ
エハー支持用溝、５……運搬用取手の止め具、６
……止め具の回転軸。
1 and 2 are perspective views showing an embodiment of the semiconductor wafer storage jig of the present invention. Figures 3 and 4 are
FIG. 1 is a perspective view showing a conventional semiconductor wafer storage jig. In the figure, 1... Semiconductor wafer storage jig main body, 2a, 2b, 2c... Handle for transportation, 3a
, 3b... Semiconductor storage jig side wall, 4... Semiconductor wafer support groove, 5... Stopper for transportation handle, 6
...The rotation axis of the stopper.
Claims (1)
、少なくとも一対の対向する側壁の各々に取手を
付けたことを特徴とする半導体ウエハー収納治具
。 A semiconductor wafer storage jig for storing a plurality of semiconductor wafers, characterized in that a handle is provided on each of at least a pair of opposing side walls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998885U JPS6217136U (en) | 1985-07-17 | 1985-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998885U JPS6217136U (en) | 1985-07-17 | 1985-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6217136U true JPS6217136U (en) | 1987-02-02 |
Family
ID=30988601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998885U Pending JPS6217136U (en) | 1985-07-17 | 1985-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6217136U (en) |
-
1985
- 1985-07-17 JP JP10998885U patent/JPS6217136U/ja active Pending